| Sb掺杂对ZnO厚膜的电导和气敏性能的影响 |
| |
| 引用本文： | 江国顺,李惠,张明明,王东生.Sb掺杂对ZnO厚膜的电导和气敏性能的影响[J].航空计测技术,2006,26(Z1):9-12. |
| |
| 作者姓名： | 江国顺 李惠 张明明 王东生 |
| |
| 作者单位： | 中国科学技术大学材料科学与工程系，中国科学技术大学材料科学与工程系，中国科学技术大学材料科学与工程系，中国科学技术大学材料科学与工程系 安徽 合肥 230026，安徽 合肥 230026，安徽 合肥 230026，安徽 合肥 230026 |
| |
| 摘 要： | 用共沉淀的方法,制备了纤锌矿结构的ZnO及其掺Sb的ZnO纳米粉.X射线衍射(XRD)分析表明,当锑掺量小于5wt%时没有新相生成.纯ZnO和掺Sb的ZnO器件的气敏和电阻测试结果发现:不同的厚膜烧结工艺对气体的敏感性影响较大,并且掺Sb后ZnO的气敏性能有所提高,电导峰消失.从缺陷角度、XPS分析的结果进行了讨论,初步解释了锑的掺入导致电导变化和气敏性能提高的原因.
|
| 关 键 词： | ZnO 掺杂 气敏 电导 Sb2O3 |
Influence of Sb Dopant on the Conductivity and Gas Sensitivity of ZnO Thick Films |
| |
| JIANG Guo-shun,LI Hui,ZHANG Ming-ming,WANG Dong-sheng.Influence of Sb Dopant on the Conductivity and Gas Sensitivity of ZnO Thick Films[J].Aviation Metrology & Measurement Technology,2006,26(Z1):9-12. |
| |
| Authors: | JIANG Guo-shun LI Hui ZHANG Ming-ming WANG Dong-sheng |
| |
| Abstract: | Pure ZnO and doped-ZnO with Sb nanoparticles, are prepared by chemical coprecipitation. X- ray diffraction(XRD) results indicates that the wurtzite structure of ZnO is formed while the amount of antimony is less than 5wt%. According to the test results of gas sensitivity and conductivity of ZnO and Sb doped-ZnO sensors , it is found that the sensitivity was influenced greatly by different sintering condition and is improved by doping the Sb,the conductive apex of Sb doped ZnO is disappeared. The result of XPS and the defect of sample can explain the changes in conductivity and gas sensitivity . |
| |
| Keywords: | ZnO dope conductivity gas sensitivity Sb2O3 |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
