| RB—SiC高致密、超光滑SiC表面改性涂层的制备 |
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| 引用本文： | 苑永涛,刘红,陈益超,敬畏,宋宁,方敬忠.RB—SiC高致密、超光滑SiC表面改性涂层的制备[J].航天返回与遥感,2011,32(6):74-77. |
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| 作者姓名： | 苑永涛 刘红 陈益超 敬畏 宋宁 方敬忠 |
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| 作者单位： | 中国科学院光电技术研究所,成都,610209 |
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| 摘 要： | 为了获得高质量光学表面的碳化硅反射镜，利用射频磁控溅射方法，在直径80mm的RB—SiC基片上沉积了厚约60μm的SiC致密改性涂层，使用传统机械抛光方法对改性层进行超光滑加工，并测试了改性前后的表面粗糙度。结果表明，抛光后SiC表面改性RB—SiC反射镜表面粗糙度均方根（rms）值达到了0．316nm。获得了具有较高...
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| 关 键 词： | 反应烧结碳化硅 射频磁控溅射 表面改性 材料制备 光学反射镜 |
Preparation of High Compact and Super-smooth SiC Surface Modification Coating on RB-SiC Mirror |
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| Yuan Yongtao Liu Hong Chen Yichao Jing Wei Song Ning Fang Jingzhong.Preparation of High Compact and Super-smooth SiC Surface Modification Coating on RB-SiC Mirror[J].Spacecraft Recovery & Remote Sensing,2011,32(6):74-77. |
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| Authors: | Yuan Yongtao Liu Hong Chen Yichao Jing Wei Song Ning Fang Jingzhong |
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| Institution: | Yuan Yongtao Liu Hong Chen Yichao Jing Wei Song Ning Fang Jingzhong (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China) |
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| Abstract: | In order to manufacture RB-SiC mirrors of fine optical surface, 601zm thick SiC coating was prepared by RF magnetron sputtering on RB-SiC substrate of 80mm diameter and then polished.Tests with ZYGO surface profilometer show that the surface roughness rms of the surface-modified RB-SiC achieves 0.316nm. Therefore, the magnetron sputtered SiC coating can satisfy the requirements of RB-SiC surface modification. |
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| Keywords: | RB-SiC RF magnetron sputtering Surface modification Material preparation Optical mirror |
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