| 静电MEMS器件的力电耦合分析与模拟 |
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| 引用本文： | 衣克洪,谢友宝,李尧忠. 静电MEMS器件的力电耦合分析与模拟[J]. 航空精密制造技术, 2005, 41(5): 39-41 |
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| 作者姓名： | 衣克洪 谢友宝 李尧忠 |
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| 作者单位： | 南昌航空工业学院,江西,南昌,330034;南昌航空工业学院,江西,南昌,330034;南昌航空工业学院,江西,南昌,330034 |
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| 摘 要： | 分析了微机电系统中静电-结构耦合的拉入(pull-in)特性,比较了牛顿迭代法、松弛法、有限元/边界元混合法等方法求解静电-结构耦合问题的各自特点。
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| 关 键 词： | 微机电系统 力电耦合 拉入电压 牛顿迭代法 |
| 文章编号： | 1003-5451(2005)05-0039-03 |
| 修稿时间： | 2004-10-27 |
Mechanical-electrical Coupling Analysis and Simulation for Electrostatic MEMS Device |
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| YI Ke-hong,XIE You-bao,LI Yao-zhong. Mechanical-electrical Coupling Analysis and Simulation for Electrostatic MEMS Device[J]. Aviation Precision Manufacturing Technology, 2005, 41(5): 39-41 |
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| Authors: | YI Ke-hong XIE You-bao LI Yao-zhong |
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| Abstract: | Coupled electro-mechanical behavior is an important characteristic of electrostatic microelectromechanical system(MEMS) actuators.Comparisons of Newton iteration algorithm,relaxation method and combination of finite element method and boundary element method are described in solving the electro-structure coupled domain. |
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| Keywords: | microelectromechanical system mechanical-electrical coupling pull-in voltage Newton iteration algorithm |
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