| 微小尺寸夫朗荷费衍射测量中的误差研究 |
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| 引用本文： | 颜树华,吕海宝.微小尺寸夫朗荷费衍射测量中的误差研究[J].宇航计测技术,1998,18(2):13-18. |
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| 作者姓名： | 颜树华 吕海宝 |
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| 作者单位： | 国防科技大学 |
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| 摘 要： | 分析了用夫朗荷费衍射测量微小尺寸的原理误差，包括夫朗荷费近似误差和极值特征点位置探测误差。以狭缝为例，利用计算机仿真技术对该两项系统误差进行了修正。
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| 关 键 词： | 夫朗荷费衍射，误差分析，模拟，误差修正 |
Error research in measuring small dimensions by Fraunhofer diffraction |
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| Yan Shuhua, Lu Haibao , Huang Rui , Wang Yueke , Zhou Weihong.Error research in measuring small dimensions by Fraunhofer diffraction[J].Journal of Astronautic Metrology and Measurement,1998,18(2):13-18. |
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| Authors: | Yan Shuhua Lu Haibao Huang Rui Wang Yueke Zhou Weihong |
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| Institution: | Yan Shuhua; Lu Haibao ; Huang Rui ; Wang Yueke ; Zhou Weihong |
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| Abstract: | Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction , including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect. Taking the slit diffraction for example, these systematic errors are corrected by using the computer simulation technique . |
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| Keywords: | Fraunhofer diffraction Error analysis Simulation Error correction |
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