一种原位测量轨道原子氧效应的电阻型传感器

为了发展原子氧环境及其效应飞行实验技术，获得在轨飞行实验数据，北京卫星环境工程研究所研制了一种小型、低成本的原子氧环境及其效应探测器。这种探测器的传感器采用对原子氧敏感的导电材料制备电阻膜。电阻膜在飞行试验中遭遇到原子氧剥蚀。在轨道飞行实验中，通过原位监测受原子氧剥蚀传感器电阻值的变化，可以探测原子氧环境通量密度及被试验样品的原子氧剥蚀率。目前，采用电镀法及紫外线光刻和金属刻蚀微加工技术，已经成功制备了原子氧通量密度锇膜电阻传感器。它可以测量原子氧的通量密度和积分通量，在400～500 km的轨道高度工作寿命约为1年。原子氧效应探测器是在石英玻璃基底上淀积银膜，试验材料膜涂覆在银膜上。试验材料膜在轨与原子氧反应而变得越来越薄，当其被完全剥蚀后，暴露出来的银膜迅速被氧化，并且电阻变大。试验材料膜的剥蚀时间可以确定，试验材料的原子氧剥蚀率就可以计算出来。

A resistance-based sensor for the in-situ measurement of orbital atomic oxygen effects

A small, low-cost sensor for detecting atomic oxygen(AO) environment and its effects has been developed in Beijing Institute of Spacecraft Environment Engineering (BISEE) as a part of flight experiment techniques for AO environment and its effects. The sensor is based on an electrical resistance film made of conductive materials susceptible to AO. The AO-resistance osmium film is prepared by plating, UV-light etching and metal etching micro processing. It can be used to measure the flux and fluence of AO, with an operating life of about 1 year in the altitude of 400?500 km. The AO effect sensor is made of a quartz plate sputtered with silver film and coated on it a test film. It can be used to determine the AO erosion rate of the test film.