| 恒压式气体微流量计测量不确定度评估 |
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| 引用本文： | 冯焱,成永军,张涤新.恒压式气体微流量计测量不确定度评估[J].航空计测技术,2006,26(3):46-48. |
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| 作者姓名： | 冯焱 成永军 张涤新 |
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| 作者单位： | 兰州物理研究所,甘肃兰州730000 |
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| 摘 要： | 介绍了恒压式气体微流量计的组成和校准原理.在对电容薄膜规做了热流逸效应实验的基础上,对流量计的测量不确定度进行了评估,给出了扩展不确定度和包含因子.通过传递标准漏孔与德国PTB开展了漏率比对,验证了测量不确定度评估结果的可靠性.
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| 关 键 词： | 恒压 气体微流量计 测量不确定度 评估 |
| 文章编号： | 1002-6061(2006)03-0046-03 |
| 收稿时间： | 2005-09-27 |
| 修稿时间： | 2006-01-10 |
Uncertainty Evaluation of Constant Pressure Gas Micro-flowmeter |
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| FENG Yan,CHENG Yong-jun,ZHANG Di-xin.Uncertainty Evaluation of Constant Pressure Gas Micro-flowmeter[J].Aviation Metrology & Measurement Technology,2006,26(3):46-48. |
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| Authors: | FENG Yan CHENG Yong-jun ZHANG Di-xin |
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| Institution: | Lanzhou Institute of Physics, Lanzhou 730000, China |
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| Abstract: | The structure and calibration theory of a constant pressure gas micro-flowmeter are introduced.On the basis of thermal transpiration effect experiments of capacitance diaphragm gauge(CDG), the uncertainties of constant pressure gas micro-flowmeter are strictly evaluated.And the expanded uncertainties and coverage factors are also given.Through the leak-rate comparison with PTB using standard leak,the reliability of uncertainty evaluation results has been verified. |
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| Keywords: | constant pressure gas micro-flowmeter uncertainty of measurement evaluation |
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