面外轴向检测MEMS加速度计研究现状

面外轴向检测微机电系统（MEMS）加速度计（Z轴MEMS加速度计）是MEMS惯性系统中用于提供面外加速度信号的重要器件。文章首先介绍了Z轴加速度计的两种典型结构，列举了国内外科研机构近年来的研究成果，概述其在结构设计、工艺制造等方面的特点，以及在性能指标、三轴单片集成等方面的进展。最后，结合Z轴MEMS加速度计的研究现状，对其在结构优化、性能提升、工艺制造、单片三轴集成等方向的发展进行了展望。

Research Status of Out-of-Plane Axial Detection MEMS Accelerometer

Out-of-plane axial detection accelerometer (Z-axis MEMS accelerometer) is an important device used to provide out-of-plane acceleration in a micro-inertial system. Firstly, two typical structures of Z-axis accelerometer are introduced, and the research results of domestic and foreign research institutions in recent years are listed. The characteristics of Z-axis accelerometer in structural design, process manufacturing, performance index and three-axis monolithic integration are summarized. Finally, combined with the recent research status of the Z-axis MEMS accelerometer, the development in the direction of size optimization, performance optimization, process progress, monolithic three-axis integration, etc. is prospected.