嵌套环MEMS陀螺研究综述

嵌套环MEMS谐振陀螺是一种基于Coriolis效应的振动陀螺，具有结构全对称、加工鲁棒性好、电容灵敏度高、可采用传统体硅加工工艺实现批量化制造等优点，是目前最具性能潜力的微陀螺方案之一。首先阐述了嵌套环MEMS谐振陀螺的基本结构和工作原理，然后针对其在敏感结构设计及演化、品质因数提升、频率匹配技术、非线性效应与参数放大技术及零偏补偿技术等方面的发展进行了讨论，并对其在结构设计、加工技术、测控电路、新机理和新效应的应用等方面的发展进行了展望。嵌套环MEMS谐振陀螺可以实现高精度的角速率测量，具有巨大的性能潜力和较好的应用前景。

Review of Research on MEMS Disk Resonator Gyroscope

The MEMS disk resonator gyroscope is a vibrating gyroscope based on Coriolis effect. It has the advantages of full structural symmetry, good processing robustness, high capacitance sensitivity, mass-produce that can be realized by traditional bulk Silicon processing technology. It is one of the most promising micro-gyroscope solutions. Firstly, the basic structure and working principle of the MEMS disk resonator gyroscope are expounded, and then the development of disk resonator gyroscope on sensitive structure design and evolution, quality factor improvement, frequency matching technology, nonlinear effect and parametric amplification technology, and zero-bias compensation technology are discussed. Then, the development of disk resonator gyroscope on the structure design, fabrication technology, readout circuits, and the application of new effects and mechanisms are prospected. High precision angular rate measurement can be achieved by the MEMS disk resonator gyroscope, and it has great performance potential and good application prospects.