| 过滤式阴极电弧沉积类金刚石薄膜的特性分析 |
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| 引用本文： | 左敦稳,朱纪军,王珉. 过滤式阴极电弧沉积类金刚石薄膜的特性分析[J]. 航空学报, 1999, 20(2): 144-147 |
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| 作者姓名： | 左敦稳 朱纪军 王珉 |
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| 作者单位： | 南京航空航天大学机电工程学院, 南京, 210016 |
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| 摘 要： | 利用自行研制的过滤式阴极电弧沉积装置，在硅片和高速钢基体材料上获得了类金刚石薄膜，分别采用扫描电镜、原子力显微镜、喇曼光谱以及磨损实验等手段对薄膜进行了分析研究。结果表明，所获得的类金刚石薄膜为非晶态，sp3含量最高达70%;基体材料对成膜质量影响较大，在硅片上薄膜的摩擦系数可达0.08;同时偏压的变化会引起喇曼谱线中D峰和G峰位置向低频移动，半高宽σG增大、σD减小。
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| 关 键 词： | 类金刚石薄膜 真空电弧沉积 扫描电镜 原子力显微镜 喇曼光谱 |
| 收稿时间： | 1998-05-20 |
| 修稿时间： | 1998-08-17 |
CHARACTERIZATION OF DIAMOND LIKE CARBON FILM PREPARED BY VACUUM ARC DEPOSITION |
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| Zuo Dunwen,Zhu Jijun,Wang Min. CHARACTERIZATION OF DIAMOND LIKE CARBON FILM PREPARED BY VACUUM ARC DEPOSITION[J]. Acta Aeronautica et Astronautica Sinica, 1999, 20(2): 144-147 |
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| Authors: | Zuo Dunwen Zhu Jijun Wang Min |
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| Affiliation: | Institute of Mechanical Engineering, Nanjing University of Aeronautics & Astronautics, Nanjing, 210016 |
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| Abstract: | Diamond like carbon films are successfully obtained on silicon and high speed steel substrates by using a self developed device of filtered vacuum arc deposition.The films are analyzed with SEM, AFM, Raman spectrum and wear test.The substrate affects greatly the film quality, and a change in the bias voltage applied across the substrate can result in a remarked change in μ D, μ G, σ D, and σ G of the film's Raman spectrum. |
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| Keywords: | diamond like carbon vacuum arc deposition SEM AFM Raman spectrum |
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