NEW CLOSED-LOOP DRIVING CIRCUIT OF SILICON MICROMACHINED VIBRATORY GYROSCOPE

A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed. The push-pull driving is adopted and in-phase AC and reverse-phase DC voltages are applied in the driving electrodes placed in both sides of the active combs, respectively. Driving performance analyses show that the frequency spectrum between driving moments and noise signals is separated. Therefore, the model of the closed-loop control is set up with the phase lock loop (PLL). The requirements for phases and gains of the sinusoidal selfdrive-oscillation are met by PLL, thus the closed-loop circuit reaches the self-drive-oscillation. Phase conditions of the sinusoidal self-drive-oscillation and the characteristic of phase discrimination of the PLL are used to eliminate the coupling between driving and sense signals, and noise signals. Finally, experimental results show that the variations of both the driving frequency and the amplitude are all under 0.02%. The precision and the reliability of the gyroscope are greatly improved.