| 激光清洗技术的现状及展望 |
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| 引用本文： | 刘雨佳,刘建华.激光清洗技术的现状及展望[J].航空精密制造技术,2010,46(2). |
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| 作者姓名： | 刘雨佳 刘建华 |
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| 作者单位： | 1. 中国农业大学工学院,北京,100083
2. 北京航空精密机械研究所,北京,100076 |
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| 摘 要： | 介绍了激光清洗技术的原理和方法,并展望了激光清洗技术在空间领域,海洋船舶甚至日常工作中的应用前景.
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| 关 键 词： | 激光清洗 微电子 |
Status and Prospects of Laser Cleaning Technology |
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| Abstract: | Laser cleaning is a kind of laser surface treatment. The principle and methods of laser cleaning technology were introduced. Its application prospects in aerospace, marine vessels, and even in daily working were provided. |
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| Keywords: | laser cleaning microelectronics |
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