| 外差干涉测量系统的标定 |
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| 引用本文： | 于瀛洁,李鹏生. 外差干涉测量系统的标定[J]. 宇航计测技术, 1999, 19(2): 16-21 |
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| 作者姓名： | 于瀛洁 李鹏生 |
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| 作者单位： | 上海大学 |
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| 摘 要： | 对纳米级测量系统进行标定是一个难题。结合某一外差干涉测量系统，提出了一个对测量系统的分辨力、输入输出特性进行标定的简单易行的方法。
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| 关 键 词： | 外差法 干涉测量 标定 输入输出特性 分辨力 |
Demarcation for the measurement system of heterodyne interference |
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| Yu Yingjie Li Pengsheng Zhang Zhuo Qiang Xifu. Demarcation for the measurement system of heterodyne interference[J]. Journal of Astronautic Metrology and Measurement, 1999, 19(2): 16-21 |
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| Authors: | Yu Yingjie Li Pengsheng Zhang Zhuo Qiang Xifu |
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| Affiliation: | Yu Yingjie Li Pengsheng Zhang Zhuo Qiang Xifu |
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| Abstract: | It is a difficult to demarcate a measurement system which accuracy is within in nanometre order. Puts forward a simple method to demarcate the input output characteristic and resolution of the measurement system of heterodyne interference. |
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| Keywords: | Heterodyne method Interferometric measurement Demarcation Input output characteristic Resolution |
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