基于声表面波的全石英压力传感器研究

针对谐振器集成结构中压力和温度参量的非线性耦合问题，本文提出了一种改进的双腔室结构的声表面波温度压力复合传感器，开展了声表面波全石英压力传感器的设计与实验研究。本文基于有限元方法和微扰理论分析了石英基声表面波压力传感器的响应机理，利用耦合模理论优化设计了三谐振器型敏感元件，采用玻璃浆料键合实现了石英跨引线气密封装，实现了声表面波全石英压力传感器的制备。测试结果表明：所研制的声表面波全石英压力传感器在0 ℃~120 ℃工作温度范围内，压力量程为0~500 kPa，线性度为0.415% FS，压力灵敏度为-551 kHz/MPa，其灵敏度温度系数为-0.134%。该声表面波全石英压力传感器的研制为后续实现传感器的无线无源测量奠定了基础。

Study on All Quartz Package SAW Pressure Sensors

In this paper, an improved Surface Acoustic Wave (SAW) temperature and pressure sensor with two chambers is proposed to solve the nonlinear coupling problem in the integrated structure suggested in earlier studies, and the design and experimental study of an acoustic surface wave all quartz pressure sensor is carried out. Based on the finite element method and perturbation theory, the response mechanism of the quartz-based SAW pressure sensor is analyzed, the coupled mode theory is used to optimize the design of the three-resonator-type sensitive element, and the glass paste bonding is used to realize the quartz cross-lead hermetic encapsulation, and the preparation of the SAW allquartz pressure sensor is realized. The test results show that the developed SAW all quartz pressure sensor has a pressure range of 0~500 kPa, a linearity of 0.415% FS, a pressure sensitivity of 551 kHz/MPa, and a temperature coefficient of sensitivity of 0.134% over the operating temperature range of 0 ℃~120 ℃. The development of this surface acoustic wave all quartz pressure sensor lays the foundation for the subsequent realization of wireless passive measurement of the sensor.