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万工显光学接触器的测力对测量精度的影响及其消除
引用本文:陈晓怀. 万工显光学接触器的测力对测量精度的影响及其消除[J]. 宇航计测技术, 1990, 0(6): 18-22
作者姓名:陈晓怀
作者单位:合肥工业大学 讲师
摘    要:研究了万工显光学接触器在测量过程中其测力对测量精度的影响,建立了该项误差的数学模型,并通过实例对误差进行修正,消除了测力所引起的测量误差,提高了万工显的测量精度。

关 键 词:+光学接触器  +测量力  弯曲  测量误差  误差校验

The effect of measuring force of optical contact probe of universal tool maker''''s microscope on measurement accuracy and its eliminating method
Chen Xiaohuai. The effect of measuring force of optical contact probe of universal tool maker''''s microscope on measurement accuracy and its eliminating method[J]. Journal of Astronautic Metrology and Measurement, 1990, 0(6): 18-22
Authors:Chen Xiaohuai
Affiliation:Chen Xiaohuai
Abstract:The effect of measuring force of optical contact probe of universal tool maker's microscope on the measurement accuracy is researched and the mathematical model of this error is established.An example to explain how to correct the error is present,Thereby,the measuring errors caused by measuring force has been eliminated,the accuracy is enhanced.
Keywords:Optical contact probe  Measuring force  Bending Measurement error  Error checking
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