| 微机电系统MEMS仿真与建模 |
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| 引用本文： | 杨雪君.微机电系统MEMS仿真与建模[J].西安航空技术高等专科学校学报,2011,29(5):52-54. |
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| 作者姓名： | 杨雪君 |
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| 作者单位： | 黄冈职业技术学院机电学院,湖北黄冈,438002 |
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| 摘 要： | 微机电系统是源于微电子加工技术,融合了微机械制造、传感、致动及微控制于一体的系统。微机电系统融合了力、电、流体、光、磁、热等多个物理域,随着建模与仿真技术的迅速发展,研究有关微机电系统建模与仿真的基本理论和方法。
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| 关 键 词： | 微机电系统 微机械动力学 仿真与建模 |
MEMS Simulation ＆ Model Establishment |
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| YANG Xue-jun.MEMS Simulation ＆ Model Establishment[J].Journal of Xi'an Aerotechnical College,2011,29(5):52-54. |
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| Authors: | YANG Xue-jun |
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| Institution: | YANG Xue-jun(Electromechanical School,Huanggang Polytechnic College,Huanggang 438002,China) |
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| Abstract: | MEMS originates from micro-electronics processing technology and integrates micro-mechanical manufacturing,sensing,actuation,and micro-control.The system covers a variety of physical fields such as force,power,flow,light,magnet,and heat.With the rapid development of model establishment and simulation technology,the article studies the basic theories and methods of MEMS model establishment simulation. |
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| Keywords: | MEMS micro-mechanical dynamics simulation and model establishment |
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