Integrated micro-electro-mechanical sensor development for inertialapplications |
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| Authors: | Allen JJ Kinney RD Sarsfield J Daily MR Ellis JR Smith JH Montague S Howe RT Boser BE Horowitz R Pisano AP Lemkin MA Clark WA Juneau T |
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| Institution: | Sandia Nat. Labs., Albuquerque, NM; |
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| Abstract: | Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers |
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