| 制备工艺对金刚石形核质量的影响 |
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| 引用本文： | 霍晓,任家烈.制备工艺对金刚石形核质量的影响[J].航空材料学报,1995,15(1):45-50. |
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| 作者姓名： | 霍晓 任家烈 |
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| 作者单位： | 清华大学，清华大学机械系焊接教研室 |
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| 摘 要： | 研究了制备工艺对微波等离子体ＣＶＤ金刚石成膜质量的影响。详细讨论了基片在等离子体中的位置、基片台结构、Ｎ２等离子体预处理及启动条件对金刚石成膜均匀性的影响。提出了能获得均匀金刚石膜的制备工艺程序。
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| 关 键 词： | 金刚石，薄膜，化学汽相沉积，形核 |
INFLUENCE OF SYNTHESISING TECHNOLOGY ON DIAMOND FILMING QUALITY |
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| Huo Xiao , Ren Jialie, Lu Anli.INFLUENCE OF SYNTHESISING TECHNOLOGY ON DIAMOND FILMING QUALITY[J].Journal of Aeronautical Materials,1995,15(1):45-50. |
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| Authors: | Huo Xiao Ren Jialie Lu Anli |
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| Institution: | Tsinghua University |
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| Abstract: | The influence of synthesising technology on the nucleation of diamond film deposited by microwaveplasma CVD was investigated. The effect of substrate's position in the plasma , substrate holder styles , H2plasma pretreatment and start-up conditions on diamond nucleation uniformity was discussed in detail. Fi-nally, a set of synthesis procedure to assure formation of uniform diamond film had been established. |
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| Keywords: | diamonds films CVD nucleation |
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