| 脉动压力传感器研制 |
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| 引用本文： | 陶锡有.脉动压力传感器研制[J].实验流体力学,1997(2). |
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| 作者姓名： | 陶锡有 |
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| 作者单位： | 中国空气动力研究与发展中心!绵阳，621000 |
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| 摘 要： | 测量脉动压力用压阻式压力传感器，通过有限元应力分析求得灵敏度高、线性又好的双岛硅膜片结构；采用双面对准光刻工艺，各向异性腐蚀微机械加工制硅膜片等新技术。最后给出了脉动压力传感器的动、静态性能指标。
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| 关 键 词： | 脉动压力 传感器 有限元 应力集中 压阻效应 |
RESEARCH AND PRODUCTION OF PULSATING PRESSURE TRANSDUCERS |
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| Tao Xiyou.RESEARCH AND PRODUCTION OF PULSATING PRESSURE TRANSDUCERS[J].Experiments and Measur in Fluid Mechanics,1997(2). |
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| Authors: | Tao Xiyou |
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| Abstract: | Piezoresistive pressure transducers may be used to measure pulsating pressure.DuaLisland silicon diaphragm structure of high sensitivity and good linearity can be achived by fi-nite element analysis(FFA). Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc. Finally dynamic-static characteristics of pulsating pressure transducers are given. |
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| Keywords: | pulsating pressure transducers finite element analysis (FEA) concentration of stress piezoresistive effect |
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