| 微压压力传感器的结构改进 |
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| 引用本文： | 鲍敏杭,沈绍群.微压压力传感器的结构改进[J].航空计测技术,1995,15(5):6-8,32. |
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| 作者姓名： | 鲍敏杭 沈绍群 |
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| 作者单位： | 复旦大学电子工程系!上海市，200433 |
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| 摘 要： | 硅压力传感器具有小型和高灵敏等的优点，近年来小型高灵敏度的压力传感器的量程已低到１ｋＰａ。在这一发展过程中硅弹性体结构的改进起了很大的作用，本文介绍了作者首先提出了适用于微压压力传感器的梁膜（岛）结构以及以后几年来出现的相近的结构，用这些结构都已制成量程为１ｋＰａ的压力传感器 。
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| 关 键 词： | 微压 压力传感器 结构 传感器 |
Evolution of Diaphragm Structure for low Range Pressure Transducers |
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| Bao Minhang,Shen Shaoqun,Chen Hong,Ma Qinghua.Evolution of Diaphragm Structure for low Range Pressure Transducers[J].Aviation Metrology & Measurement Technology,1995,15(5):6-8,32. |
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| Authors: | Bao Minhang Shen Shaoqun Chen Hong Ma Qinghua |
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| Institution: | Bao Minhang;Shen Shaoqun;Chen Hong;Ma Qinghua |
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| Abstract: | Silicon pressure transducers feature miniaturization and high sensitivity. The pressurerange for nimiature pressure transducers has been as low as 1 kPa by now. In the development of highsensitivity pressure transducer,the inprovement of diaphragm structure has been playing an importantrole. lntroduced in this paper is the beam-diaphragm (island)structure, first proposed by the authors in1989. Also introduced are two similar structures proposed by TUB and Honeywell in 1993 and 1992,respectively. 1 kPa pressure range has been achieved by all these three structure. |
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| Keywords: | Low pressure range Pressure transducer structure |
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