| Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation |
| |
| 作者姓名： | Quanli ZHANG Qiwen WANG Zhen ZHANG Yucan FU Jiuhua XU |
| |
| 作者单位： | 1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics;2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics |
| |
| 基金项目： | supported by the National Natural Science Foundation of China (No. 51805257)；;the China Postdoctoral Science Foundation (No. 2019TQ0151)；;the National Natural Science Foundation of China for Creative Research Groups(No. 51921003)；;the Postgraduate Research&Practice Innovation Program of Jiangsu Province,China (No. KYCX19＿0162)； |
| |
| 摘 要： | Fabrication of the surface micro-texture on the C-plane sapphire is undertaken by a355 nm Ultraviolet(UV) pulsed laser. The surface micro-textures of sapphire with different laser scanning line spacing ranging from 10 lm to 100 lm are obtained, where the selection range of scanning line spacing is controlled in the range of the groove width and plasma width to obtain a surface of high Peak-Valley(PV) value. A reasonable processing order is proposed to manufacture different types of surface micro...
|
| 收稿时间： | 29 October 2020 |
Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation |
| |
| Quanli ZHANG,Qiwen WANG,Zhen ZHANG,Yucan FU,Jiuhua XU.Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation[J].Chinese Journal of Aeronautics,2022,35(3):525-536. |
| |
| Institution: | 1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| |
| Abstract: | Fabrication of the surface micro-texture on the C-plane sapphire is undertaken by a 355 nm Ultraviolet (UV) pulsed laser. The surface micro-textures of sapphire with different laser scanning line spacing ranging from 10 μm to 100 μm are obtained, where the selection range of scanning line spacing is controlled in the range of the groove width and plasma width to obtain a surface of high Peak-Valley (PV) value. A reasonable processing order is proposed to manufacture different types of surface micro-textures on sapphire by laser ablation trajectory regulation. In the multiple-passes laser ablation of sapphire by the UV nanosecond pulsed laser, the scanning lines in each direction is treated as once scanning. On this basis, the multiple processing can be carried out to avoid the influence of the subsequent scanning on the machined groove. In addition, the effect of different scanning line spacing on the PV value is quantified and different types of surface micro-textures on sapphire, including the squares, the rhombuses and the hexagons, are successfully fabricated, which can be applied in the friction reduction or anti-reflection field. |
| |
| Keywords: | Laser ablation trajectory Sapphire Scanning line spacing Surface micro-texture PV values |
| 本文献已被 ScienceDirect 等数据库收录！ |
