| 等分压常压累积检漏技术 |
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| 引用本文： | 康小录.等分压常压累积检漏技术[J].上海航天,1999,16(5):43-46. |
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| 作者姓名： | 康小录 |
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| 作者单位： | 上海航天技术研究院801所!上海200233 |
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| 摘 要： | 通过对常用的大气压累积法氦质谱检漏过程的理论分析，指出了该方法可能的系统误差。分析认为：对于表面材料粘附几率较小的被检件，可以采用常用的大气压累积检漏方法进行总漏率的测量，而对于表面材料粘附几率较大的被检件（ 如表面存在大量的有机材料等） ，如采用常用的大气压累积检漏方法进行总漏率的测量必将带来较大的系统误差。最后，提出了消除该系统误差的等分压常压累积检漏技术，并与常用的常压累积法检漏技术进行了比较。
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| 关 键 词： | 检漏 质谱检漏 累积检漏 检漏技术 |
A METHOD OF LEAK DETECTION BY ACCUMULATING EQUAL PARTIAL PRESSURE AT NORMAL ATMOSPHERE |
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| KANG Xiao,lu.A METHOD OF LEAK DETECTION BY ACCUMULATING EQUAL PARTIAL PRESSURE AT NORMAL ATMOSPHERE[J].Aerospace Shanghai,1999,16(5):43-46. |
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| Authors: | KANG Xiao lu |
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| Abstract: | The system error of usual leak detection by accumulating at normal atmosphere is given by analyzing the leak detection procedure. A new method of Leak Detection by accumulating equal partial pressure at normal atmosphere, which can be used to reduce the system error, is developed and is compared with usual leak detection by accumulating at normal atmosphere. |
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| Keywords: | Leak detection Mass spectrometer leak detection Accumulating leek detection Leakage checking technique |
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