|
|||||
|
|
| 面向精密制造的微材料特性检测机构 | |
| 引用本文： | 陆震,陈学东,何广平.面向精密制造的微材料特性检测机构[J].北京航空航天大学学报,2010,36(3):328-332. |
| 作者姓名： | 陆震 陈学东 何广平 |
| 作者单位： | 北京航空航天大学,自动化科学与电气工程学院,北京100191;华中科技大学,机械科学与工程学院,武汉430074;北方工业大学机电工程学院,北京,100144 |
| 基金项目： | 国家重点实验室开放基金资助项目 |
| 摘 要： | 微机电系统(MEMS,Micro Electromechanical Systems)在航空航天、汽车、生物医学、环境监控、军事等领域中有着广泛的应用前景.其材料力学性能的测试目前是其性能测试的薄弱环节,它涉及到微位移、精密定位和载荷/位移测量.采用传统"机械"制造技术,由于摩擦、间隙、爬行和多环节传动误差积累等原因而无法实现.为此,提出了一种冗余驱动全柔性并联机构和压电陶瓷驱动器所组成的新型测量平台.在推导4RRR冗余驱动并联机构运动学逆问题方程的基础上,经过最佳拓扑选择、运动学分析,并基于动力学优化,确定了微位移/精密定位运动平台主要结构尺寸.实验表明:采用该平台,可以满足MEMS材料力学性能测量所需的微位移和精确定位要求. |
| 关 键 词： | 微机电系统 冗余驱动 全柔性机构 |
| 收稿时间： | 2009-03-02 |
Micro-material-test mechanism oriented precision technique |
|
| Lu Zhen,Chen Xuedong,He Guangping.Micro-material-test mechanism oriented precision technique[J].Journal of Beijing University of Aeronautics and Astronautics,2010,36(3):328-332. | |
| Authors: | Lu Zhen Chen Xuedong He Guangping |
| Institution: | 1. School of Automation Science and Electrical Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100191, China; 2. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China; 3. College of Mechanical Electronical Engineering, North University of Technology, Beijing 100144, China |
| Abstract: | Micro electromechanical systems(MEMS) have vast vistas of application in the aeronautics,astronautics,automobile,bioengineering,environmental management,military,etc.However,the material tests are the bottleneck of the property test for MEMS.That is concerned with subtle motion,precision location,and the measurement of tiny load/displacement.Traditional mechanical manufacture is helpless for the mission duo to friction,clearance,crawl,and error-accumulation of multi-transmission.For this reason,a new type o... |
| Keywords: | micro electromechanical systems redundantly actuated compliant mechanism |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |
| 点击此处可从《北京航空航天大学学报》浏览原始摘要信息 | |
| 点击此处可从《北京航空航天大学学报》下载免费的PDF全文 | |