多弧离子镀Cr/Cr2O3薄膜红外及可见光谱特性

采用多弧离子镀制备了具有不同色彩的Cr/Cr2O3薄膜,利用紫外-可见光分光光度计研究了薄膜在可见和红外波段的光谱特性,利用SEM进行薄膜表面结构和形貌的分析,利用四探针测阻仪测试了样品的方块电阻,利用红外发射率测量仪测试了样品的红外发射率。结果表明:Cr/Cr2O3薄膜具有丰富的色彩,在可见光区有明显的反射峰,可见光区光谱特性主要受膜厚的影响,方块电阻随膜厚增加而有变大,样品的红外发射率主要取决于金属层,平均红外发射率最小降至0.371。

Infrared Optical Spectral Properties of Cr/Cr2O3 Thin Films Prepared by Multi-Arc Ion Deposition

The colorful Cr/Cr2O3 thin films were prepared by Multi-arc ion deposition technique. The visible and infrared optical spectral properties were observed by use of UV-visible spectrophotometer. The surface morphology and structure were studied by scanning electron microscopy (SEM). The square resistance was analyzed by four-probe resistance measuring apparatus. The samples'infrared emissivity was measured by the infrared emissivity measuring instruments. The results show that: Cr/Cr2O3 thin films possess abundant color;obvious reflection peaks are observed in visible wave band;the visible optical spectral properties of the samples are affected mainly by the thickness of the films;the samples'square resistances change with the thickness variety of thin films,samples'infrared emissivity mainly depends on metal layer,the minimum average infrared emissivity is 0.371.