| 深微孔内径测量技术研究 |
| |
| 引用本文： | 云鹏,周彩红,梁雅军,刘柯,王晓宁. 深微孔内径测量技术研究[J]. 宇航计测技术, 2012, 39(4): 6-9. DOI: 10.12060/j.issn.1000-7202.2019.04.02 |
| |
| 作者姓名： | 云鹏 周彩红 梁雅军 刘柯 王晓宁 |
| |
| 作者单位： | 北京航天计量测试技术研究所,北京100076 |
| |
| 摘 要： | 介绍了一种基于高准确度电感传感器和红宝石测头,在测长机上实现深微孔径测量的方法,解决了内径的Φ1mm～Φ5mm、深度在40mm以下的深微孔内径的测量问题。通过对深微孔径测量装置测量不确定度的分析,在95%置信概率下,装置的测量不确定度为0.6μm,满足测量要求。
|
| 关 键 词： | 深微孔径测量 电感传感器 红宝石测头 |
Researches on Measurement Technology of Micro-and-deep Aperture |
| |
| YUN Peng,ZHOU Cai-hong,LIANG Ya-jun,LIU Ke,WANG Xiao-ning. Researches on Measurement Technology of Micro-and-deep Aperture[J]. Journal of Astronautic Metrology and Measurement, 2012, 39(4): 6-9. DOI: 10.12060/j.issn.1000-7202.2019.04.02 |
| |
| Authors: | YUN Peng ZHOU Cai-hong LIANG Ya-jun LIU Ke WANG Xiao-ning |
| |
| Affiliation: | (Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076) |
| |
| Abstract: | The micro-and-deep aperture measurement method on length measuring machine using high accuracy inductance transducer and ruby probe is introduced.This method can measure the micro-and-deep aperture range from Φ1mm toΦ5mm and below 40mm height.When the confidence probability is 95%,the measurement uncertainty of this device is 0.6μm.The analysis result can meet these demands of measurement. |
| |
| Keywords: | Measurement of micro-and-deep aperture Inductance sensor Ruby probe |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《宇航计测技术》浏览原始摘要信息 |
|
点击此处可从《宇航计测技术》下载全文 |
|
