球形轨道分子屏极高真空系统的抽气方程

地面真空系统中,气体处于封闭的真空容器内,达到平衡状态时,压力 P 与抽速 S 的关系是:P=OIS;轨道分子屏极高真空系统是开放的(或者说具有部分真空容器),相应的抽气方程应该是怎样的形式呢?文章提出了一个物理模型,推导出了球形轨道分子屏极高真空系统的抽气方程。

THE PUMPING EQUATION OF THE SPHERICAL WAKE SHIELD FACILITY EXTREME HIGH VACUUM SYSTEM

With regard to the ground-based vacuum system,gases are included in a closed vacuum vessel, when the equilibrium state is reached,the relation between pressure and pumping rate is established:P=Q/S; however,the vacuum system of the wake shield facility (WSF) is an open one (or possesses partial vacuum vessel),how to express the corresponding pumping equation?In this paper,a physical model was put forward, and the pumping equation of the spherical wake shield facility (WSF) has been concluded.