五分量激光测量装置的试验研究

所讨论的激光测量装置,可以同时测量~个移动轴的5个移动误差分量,即两个直线度分量和3个角位移分量。该装置测量线性误差和角位移误差的精度可分别达到1.5μm和0.5”以内。

A NEW LASER SYSTEM FOR MEASURING FIVE MOVING ERROR COMPONENTS

A new laser measurement system has been developed for identifying geometrical error of a machine tool. Five moving error components in a motional direction can be measured by using this system simultaneously, such as yawing, Pitching rolling, and two straightness errors.The system integrates a linear displacement measuring system using the unique property of retro-reflector and an angular displacement measuring system using the principle of auto-collimator. The basic system consists of twoparts: a refevence part mounted on a reference base; a measuring part fixed on the moving table to be measured.The measuring portion contains a flat mirror to detect the yaw and pitch angular errors, and two separate retroreflectors to measure the linedr errors.The rolling error component is calculated by the distance between the two retroreflectors and their two vertical linear error components. The reference portion contains a He-Ne Laser tube, a beam expander, a beam splitter, two polorized beam splitters, a combined auto-collimator , a half wave plate and a quarter wave plate, four two-dimensional position sensing devices, and three reflection mirrors.The accuracy of the system is within 1.5μm and 0.5" for linear and angular displacement respectively.