| 硅微谐振式加速度计技术现状及展望 |
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| 引用本文： | 万蔡辛,李丹东,张承亮,陈效真. 硅微谐振式加速度计技术现状及展望[J]. 导航与控制, 2010, 0(2): 72-79 |
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| 作者姓名： | 万蔡辛 李丹东 张承亮 陈效真 |
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| 作者单位： | 清华大学精密仪器与机械学系,北京,100084;北京航天控制仪器研究所,北京,100039;中国航天电子技术研究院,北京,100071 |
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| 摘 要： | 硅微谐振式微加速度计是各种MEMS加速度计中被普遍看好并期待为将来的高精度微加速度计发展的一个重要方向，正在全世界范围内被广泛研究。本文对硅微谐振式微加速度计的发展现状进行了评述。根据国内外不同的技术实现，诸如工作原理、微加工工艺实现、应用范围等对其进行了分类阐述。最后，对硅微谐振式加速度计研究中一些关键技术进行了讨论，并提出了展望。
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| 关 键 词： | 微机械 惯性传感器 加速度计 谐振 |
Present State and Perspectives of Micro Silicon Oscillating Accelerometer |
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| WAN Cai-xin,LI Dan-dong,ZHANG Cheng-liang and CHEN Xiao-zhen. Present State and Perspectives of Micro Silicon Oscillating Accelerometer[J]. Navigation and Control, 2010, 0(2): 72-79 |
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| Authors: | WAN Cai-xin LI Dan-dong ZHANG Cheng-liang CHEN Xiao-zhen |
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| Affiliation: | Departmwnt of Precision Instruments and Mechanology of Tsinghua University;Beijing Institute of Aerospace Control Device;Beijing Institute of Aerospace Control Device;China Academy of Aerospace Electronic Technology |
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| Abstract: | The silicon oscillating accelerometer (SOA) is an expected important future developing direction of many types of MEMS accelerometer, it is widely researched in the world. A review is given to the present state of SOA, according to the sequence of working principle, MEMS manufacturing technology, application fields and so on. The key techniques in the SOA research are discussed in detail. |
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| Keywords: | MEMS inertial sensors accelerometer resonant |
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