静电悬浮微机械加速度计检测电路设计

静电悬浮微机械加速度计通过静电力把质量块无接触的悬浮起来,具有极高的分辨率.一般采用差动电容式位移检测的方式来精确检测质量块在电极腔内的运动,然后在通过悬浮控制系统来实现六自由度的有源悬浮.针对该电容的检测,本文介绍了一种基于环形二极管解调的单频载波公共激励电极电容式多路位移检测方案,并进行了设计仿真与实验测试,实验测...

A Design of Electrostatically Suspended Micromechamcal Accelerometer Signal Sensing Circuit

Electrostatically suspended micromechanical accelerometer with electrostatically levitated mass in the cavity behaves high resolving power. The position of the mass is usually detected by sensing the differential mass-electrode capacitance and further fed back to multi-axis active levitation control loop with an aim to keep stable suspension of the mass. A multi-axis displacement sensing method to detect the micro-differential capacitance was designed, which was based on ring diode demodulation with single carrier wave common excitation electrode. Then interrelated performance theoretical analysis and experimental was done, which indicate that the proposed capacitive interface circuit can be used in the detect and control system of the electro statically levitated micromechanical accelerometer. The sensitivity of the experiment result can reach 4.78V/pf.