浅谈三种电容式微加速度计的空气阻尼

为明确梳齿电容式与"三明治"电容式微加速度计的噪声极限与相关的三类结构形式对应的微机械加工工艺影响,着重分析了三种工艺实现下的典型参数微加速度计的大气环境下空气阻尼情况,并剖析了不同的结构形式与不同的加工工艺对结构型式的约束和对精度极限的限制.为说明由尺度效应带来的微加速度计受空气阻尼影响而产生的远大于传统加速度计的机...

Study on Air Damping of Three Sorts of Capacitive Micro-accelerometers

In order to definite the noise limits of the comb-fingered and sandwich capacitive micro-accelerometers, as well as the affection of the three micro processes respectively corresponding to the three structure styles, the air damping coefficients of the three structures at atmosphere are analyzed. Whereafter, constrains of different structure styles and different process to air damping coefficients are distinguished. The half quantitative estimation is taken for the three sorts of capacitive micro accelerometers so that the air damping affections are distinguished from the conventional accelerometers, due to scale effect. The conclusion shows the feature and order of magnitude of mechanical Brown noise for micro accelerometers in micro scale, based on which the different limits of accuracy determined by different structure styles and process constrains are extended.