浅谈微加速度计的整流误差

为明确微机械加速度计在振荡输入过程中直流输出的情况，着重分析了静电力反馈电容式微加速度计振荡频率低于微加速度计带宽和在微加速度计带宽附近两种情况下的失衡机理。为说明微加速度计与传统加速度计的整流误差差异，对两种整流误差的情况进行了半定量计算。本文的结论说明了微加速度计与石英挠性加速度计等传统惯性仪表在整流误差方面的区别；在此基础上，引申出由于整流误差决定不同种类的微加速度计有着不同标定要求和适用范围的结论。

Study on Rectification-error of Micro Accelerometers during External Oscillation

In order to definite the DC output variation during the oscillation input, the rectification-error mechanism of electrostatic force-rebalance capacitive micro accelerometer is analyzed, both at the bandwidth frequency and at the quite low frequency. The half quantitative estimation is taken for the two sorts of oscillation rectification-error so that the rectification-error of the micro accelerometers are distinguished from the conventional accelerometers, which is confirmed by the conclusion. The conclusion shows that the oscillation rectification-error affects the different calibration methods and application fields of the different micro accelerometers.