| 小孔流导法材料放气率测量装置的设计 |
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| 引用本文： | 冯焱,曾祥坡,张涤新,李得天.小孔流导法材料放气率测量装置的设计[J].宇航计测技术,2010,30(3):66-69. |
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| 作者姓名： | 冯焱 曾祥坡 张涤新 李得天 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 介绍了小孔流导法测量真空材料放气率的原理和测量装置的设计方案。该装置由真空抽气系统、流导法测量系统、压力测量与质谱分析系统等三部分组成,设计的核心思想是采用对称的双测试室结构设计,可以精确测量测试室和分离规等带来的本底吸放气影响,并可实现实时、动态测量。装置的测量范围为（1×10^-7-1×10^-14）Pa.m^3/（s.cm^2）,温度测试范围为45℃-500℃,极限真空度为5×10^-8Pa。
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| 关 键 词： | +材料放气率 +小孔流导法 测量装置 测量方法 |
Design of Measurement Apparatus for Material Outgassing Rates by Orifice Conductance Method |
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| FENG Yan,ZENG Xiang-po,ZHANG Di-xin,LI De-tian.Design of Measurement Apparatus for Material Outgassing Rates by Orifice Conductance Method[J].Journal of Astronautic Metrology and Measurement,2010,30(3):66-69. |
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| Authors: | FENG Yan ZENG Xiang-po ZHANG Di-xin LI De-tian |
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| Institution: | (Lanzhou Institute of Physics,Lanzhou 730000) |
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| Abstract: | The principle of orifice conductance method for the measurement of material outgassing rate and the design scheme of measurement system are introduced.The measurement system consists of pump system,conductance measurement system and system for pressure measurement and mass spectrometer analysis.The key point is adopting double symmetrical measurement chamber,so real-time and dynamic measurement of the background for chamber and EXG can be obtained.The measurement range of outgassing rate and temperature are（1×10^-7～1×10^-14）Pa·m^3/（s.cm^2） and（45℃～500℃）.The limit pressure is 5×10^-8Pa. |
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| Keywords: | ＋Material outgassing rates ＋Orifice conductance method Measurement equipment Measurement method |
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