石英振梁加速度计研究现状及发展趋势

石英振梁加速度计是一种基于振梁谐振和力频特性原理的新型全固态惯性传感器，具有高精度、大量程、低功耗、直接频率脉冲输出等突出特点，已被广泛应用于战术武器系统。简要介绍了石英振梁加速度计的工作原理、技术特点，梳理了分体式和一体式两种仪表结构的研究现状和关键技术。结合国外研究发展趋势，指出石英振梁加速度计将成为后续达到摆式积分陀螺加速度计精度和抗辐照指标、满足战略级需求最有可能的加速度计方案。

Research Status and Development Trend of Quartz Vibrating Beam Accelerometer

Quartz vibrating beam accelerometer(QVBA) is a kind of novel solid-state inertial sensor based on quartz vibrating beam and force-frequency characteristics. QVBA has many outstanding advantages, such as high precision, wide range, low power consumption and direct frequency output without I/F converter, and has been widely used in tactical weapon system. In this paper, the working principle and technical characteristics of QVBA are briefly introduced, the research status and key technology for the separated structure and monolithic structure of QVBA are summarized. Based on the development trend abroad, it is pointed out that QVBA will be the most possible accelerometer scheme to achieve the precision and radiation resistance of pendulum integral gyroscope accelerometer and meet the needs of strategic level.