微玻璃半球壳体谐振子的设计、制备与表征

近年来美国国防高级研究计划局大力推进三维壳体谐振陀螺(尤其是高性能半球谐振陀螺)的微型化,以实现惯导级性能的微机械振动陀螺。提出发泡法制备直径小于1cm的微壳体谐振子,利用发泡剂在高温下释放气体,使软化后的玻璃在气压差和表面张力的作用下形成三维轴对称壳体。大气环境下多普勒测振仪的测试结果表明,利用发泡法制备的微壳体谐振子的酒杯二阶模态的谐振频率为11kHz,频率分裂值为72Hz,相对裂解值为0.65%,相应的品质因子Q值约为970和1127。发泡法有望提供一种低成本、高性能微壳体谐振子的制备方法。

Design, Fabrication and Characterization of Micro Glass Hemispherical Shell Resonator

DARPA has recently exerted effort towards the miniaturization of three dimensional shell resonator gyro, especially high-performance hemispherical resonator gyro, to achieve inertial-grade micromachined vibratory gyro. This paper proposes a foaming process to fabricate micro shell resonator with its diameter smaller than 1cm. The foaming process utilizes the thermal decomposition of the foaming agents under high temperature to release gas, and hence pressure difference and surface tensions drive the viscous glass to form 3D axisymmetric shells. Results show that the fabricated shell has the center frequency of n=2 wineglass mode resonant frequency at 11kHz and a frequency split of 72Hz between the two degenerate modes (a relative frequency mismatch of 0.65%) with their corresponding Q-factor of 970 and 1127, respectively. The foaming process may provide a low-cost way for controllably shaping high-performance micro shell resonators