探针对AFM阳极氧化加工的影响研究

利用原子力显微镜AFM进行阳极氧化纳米刻蚀加工的实质是电场作用下发生下的电化学反应,探针是影响氧化加工重要的因素。在氧化加工过程中,探针曲率半径的大小和与样品表面的相对位置影响了表面电场的分布,从而影响了氧化物的结构。由于氧化及磨损的影响,探针会失效,而碳纳米管针尖的氧化加工可以获得更高精度的纳米结构。

Influence of Tip on Anodic Oxidation Lithography Based AFM

Nanostructure of oxide can be fabricated by a nano-oxidation technique using atomic force microscopy.Its essence is nano-scale electrochemical reaction with an applied voltage.Tip as a tool is one of the most important element that influenced the lithography.The tip's radius of curvature and the relative position to the surface of the sample that influenced the distribution of the surface electric field,thus affected the structure of the oxide.With the oxidation and wear,the tip was lapsed.The lithography with carbon nanotube tip can obtain high definition nanostructure.