| 微镜单元的设计与加工工艺研究 |
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| 引用本文： | 蒋军彪,冯培德,魏芳琳,徐建东.微镜单元的设计与加工工艺研究[J].航空精密制造技术,2001,37(1):11-14. |
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| 作者姓名： | 蒋军彪 冯培德 魏芳琳 徐建东 |
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| 作者单位： | 飞行自动控制研究所, |
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| 摘 要： | 详细介绍了微光学电子机械系统MOEMS领域的用于光学信号调制的微镜单元，分析了该微镜单元的工作原理及结构，推导了动态方程的有关参数，给出了仿真结果。首次提出了该结构前两阶频率的表达式，并与相应的有限元模态分析结果进行了比较。本文还对微镜的加工工艺作了简要介绍。
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| 关 键 词： | 微镜单元 压膜阻尼 模态 微机械加工 |
| 文章编号： | 1003-5451(2001)01-0010-04 |
| 修稿时间： | 2000年9月18日 |
Research on Design and Fabrication Process of Micromirror Cell |
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| Jiang Junbiao,Feng Peide,Wei Fanglin,et al.Research on Design and Fabrication Process of Micromirror Cell[J].Aviation Precision Manufacturing Technology,2001,37(1):11-14. |
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| Authors: | Jiang Junbiao Feng Peide Wei Fanglin |
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| Abstract: | A new type of component used in the field of MOEMS for optical signal modulation, called micro-mirror cell, is presened in this paper. Moreover, the function principle and structure of the cell is described, the dynamic equation parameters are derived and the simulation result is shown. Significantly, the former two-class nature frequency expressions for the micro-mirror cell structure are put forward for the first tine, which are compared with the results from FEM analysis. Also, the micro-mirror manufactlering forocess is briefly introduced in this paper. |
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| Keywords: | micromirror cell squeeze-film damping mode micro-machine processing |
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