| 振子框架式微机械陀螺的优化设计及电学模拟 |
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| 引用本文： | 车录锋,熊斌,王跃林.振子框架式微机械陀螺的优化设计及电学模拟[J].航空学报,2002,23(3):211-214. |
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| 作者姓名： | 车录锋 熊斌 王跃林 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所,传感技术国家重点实验室,上海,200050 |
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| 基金项目： | 国家 973项目 (G19990 3 3 10 1) |
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| 摘 要： | 根据驱动模态频率和检测模态的频率相互匹配,用有限元法优化了振子框架式微机械陀螺的结构尺寸;根据建立的陀螺振动的等效电路模型,对检测振动的性能进行了模拟分析,该模型为传感器与接口电路的整体模拟打下了基础。
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| 关 键 词： | 微机械陀螺 优化设计 等效电路模型 模拟 |
| 文章编号： | 1000-6893(2002)03-0211-04 |
| 修稿时间： | 2001年6月15日 |
TIMUM DESIGN AND ELECTRICAL SIMULATION OF COMB-GIMBALMICROMACHINED GYROSCOPE |
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| CHE Lu feng,XIONG Bin,WANG Yue lin.TIMUM DESIGN AND ELECTRICAL SIMULATION OF COMB-GIMBALMICROMACHINED GYROSCOPE[J].Acta Aeronautica et Astronautica Sinica,2002,23(3):211-214. |
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| Authors: | CHE Lu feng XIONG Bin WANG Yue lin |
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| Institution: | State Key Lab. of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai 200050, China |
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| Abstract: | First according to the matching of driving mode frequency and detection mode frequency, the structure dimensions of the comb gimbal micromachined gyroscope are optimized using a finite element method (FEM). Then an equivalent circuit model of gyroscope's oscillating properties is derived, which is available in detection oscillating properties analysis and also enables the sensor simulation with the interfacing electronics. |
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| Keywords: | micromachined gyroscope optimum design equivalent circuit model simulation |
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