| 极高真空技术的发展 |
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| 引用本文： | 李得天,成永军.极高真空技术的发展[J].宇航计测技术,2009,29(5):71-76. |
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| 作者姓名： | 李得天 成永军 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 总结了极高真空(XHV低于10-9Pa的压力范围)获得和测量方法以及获得和测量极高真空的限制因素,描述了降低XHV系统器壁和元件(包括真空规或残余气体分析器)出气率采用的技术。
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| 关 键 词： | 极高真空 真空泵 电离规 出气率 |
Development of Extreme High Vacuum Technology |
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| Li De-tian,Cheng Yong-jun.Development of Extreme High Vacuum Technology[J].Journal of Astronautic Metrology and Measurement,2009,29(5):71-76. |
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| Authors: | Li De-tian Cheng Yong-jun |
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| Institution: | Li Detian Cheng Yongjun ( Lanzhou Institute of Physics, Lanzhou 730000, China) |
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| Abstract: | Methods for producing and measuring extreme high vacuum (XHV, which is the pressure range below 10~(-9) Pa) and the limits on measurement and production are examined. Techniques for reducing the outgassing rates of the walls and components of XHV systems, including the gauges or RGAs, are described. |
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| Keywords: | Extreme high vacuum Pump ~+Ionization gauge ~+Outgassing rate |
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