高回转精度微柱状电极电化学加工模型及试验

为实现高回转精度微柱状电极的精确高效在线制备，对微电极电化学刻蚀过程进行了深入的研究与改进。首先，根据电化学刻蚀原理，分析了电极旋转对柱状电极加工的影响，试验证明电极旋转可以提高电极的回转精度；其次，根据试验归纳，确立了加工电压、浸液深度和电极转速之间的函数关系，建立了高回转精度微柱状电极加工控制数学模型；最后，在上述模型的指导下，选择优化的加工参数组合，成功加工得到一系列直径为100 μm左右、同轴度误差小于1 μm的柱状电极。

Model and experimental on fabrication of cylindrical micro electrode with high rotation accuracy by electrochemical machining

To fabricate cylindrical micro electrode with high rotation accuracy efficiently and precisely on line, the process of electrochemical etching micro electrodes is investigated and improved deeply. First, the effect of rotation on the process of fabricating cylindrical electrode is analyzed based on the mechanism of electrochemical etching. It is proved that electrode rotation can improve the rotation accuracy of electrode by experiments. Second, according to the experimental results, the functional relationships among the applied voltage, immersed depth and rotation speed are established, and the mathematical model of controlling how to fabricate cylindrical electrode is built. Finally, the optimized combination of parameters is chosen under the direction of the model, and series of cylindrical micro electrodes with high rotation accuracy are fabricated with the diameter about 100 μm and the error of rotation accuracy controlled below 1 μm.