| 工业洁净室风淋系统测量方法研究 |
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| 引用本文： | 季启政,顾世红,王慧.工业洁净室风淋系统测量方法研究[J].宇航计测技术,2010,30(4):66-69. |
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| 作者姓名： | 季启政 顾世红 王慧 |
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| 作者单位： | 北京东方计量测试研究所,北京,100086 |
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| 摘 要： | 简要介绍了工业洁净室常用风淋系统的原理及其应用,分析了影响风淋系统净化效果的几种因素,给出了工业洁净室常用风淋系统的具体计量检测方法。
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| 关 键 词： | 空气吹淋室 风速 噪声 洁净度 测量方法 |
Research on the Measurement Methods of the Air Shower System in the Industrial Clean Room |
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| JI Qi-zheng,GU Shi-hong,WANG Hui.Research on the Measurement Methods of the Air Shower System in the Industrial Clean Room[J].Journal of Astronautic Metrology and Measurement,2010,30(4):66-69. |
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| Authors: | JI Qi-zheng GU Shi-hong WANG Hui |
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| Institution: | (Beijing Orient Institute of Measurement ＆ Test Chinese Academy of Space Technology,Beijing 100086) |
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| Abstract: | The theory of the air shower system in industrial clean room and its applications are described briefly.The several factors impacting on purifying effect of the air shower system are analyzed.The measurement methods of the air shower system in the industrial clean room are given. |
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| Keywords: | Air shower Wind velocity Noise Cleanliness Measurement method |
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