硅半球深腔结构无损检测技术

半球深腔的加工质量是决定硅基MEMS半球陀螺精度的关键因素之一，及时检测半球深腔的形貌参数并将其反馈至加工过程，是确保高性能MEMS半球陀螺研制成功的重要措施。由于硅半球深腔的深度较大，台阶仪和光学显微成像系统无法对半球深腔的形貌特征进行有效测量。因此,需要将硅深腔结构剖开后采用扫描电镜(SEM)进行检测。这种检测方式时间周期长，且属于破坏性的样本检测，效率和测试精度都较低。提出以硅半球深腔为模具，利用PDMS铸模将硅半球深腔的结构尺寸和表面形貌转移到PDMS凸起的半球模型上，通过检测PDMS半球模型的尺寸结构和表面形貌，即可反推出硅半球深腔的尺寸特征。经实验验证，脱模后的PDMS模型可以准确地反映出半球深腔的尺寸信息，测量结果的不确定度小于5‰，有效解决了硅半球深腔无损检测的难题。     

Investigation on Thermal and Dimensional Stability of Epoxy Resin In-Situ Modified by Cyanate Ester Resin and Polydimethylsiloxane

The thermal and dimensional stability of epoxy resin (EP) in-situ modified by cyanate ester (CE) and polydimethylsiloxane (PDMS) are investigated by means of experiments and numerical simulation. Thermal gravimetric analysis (TGA) and differential scanning calorimeter (DSC) are used to analyze the heat resistance of the modified EP. The dimensional stability is characterized by the volume shrinkage of the series PDMS/CE/EP obtained by the density method. The chemical structure of the PDMS/CE/EP is analyzed by Fourier transform infrared spectroscopy (FTIR). The results of TGA and DSC indicate that the thermal stability of PDMS/CE/EP decreases firstly and then increases with the increase in the amount of CE. The addition of PDMS shows a slight effect on the thermal stability. The 40% CE makes the blending system exhibit the lowest initial decomposition temperature, which reduces by 15.5% and 40.8% compared with pure EP and CE, respectively. The FTIR results suggested that the influence of CE on the thermal stability of the modified EP is mainly ascribed to the generation of oxazolidinone ring with low thermal stability and the increase in the triazine ring with high thermal stability. The volume shrinkage measurement results show that the introduction of CE and PDMS are both beneficial to the improvement of the dimensional stability of the blending systems. The in-situ addition of 80% CE shows the lowest volume shrinkage of 6.11%. The thermal stress distribution of PDMS/CE/EP generated during the solidification process is simulated by the finite element analysis. The results suggested that the introduction of 80% CE into EP results in the lowest thermal stress in the blending system, which indicates that the system has the lowest volume shrinkage, which agrees well with the experimental results.     

无移动部件微泵的设计、制造及基于微PIV技术的流动测量

基于简化微泵加工难度、延长寿命及特殊管道流体特性原理,设计了一种无移动部件微泵。通过数值计算对设计微泵进行优化。用特殊材料PDMS及微机械加工工艺制造出微泵。用微PIV粒子成像技术测量了微泵流场特性及流量。可实现在工作频率．600～2000Hz下,微泵流量为0．01～0．1μL／s。