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掺磷纳米硅薄膜的微结构   总被引:4,自引:0,他引:4  
采用喇曼(Raman)散射谱、高分辨率电子显微镜(HRTEM)和原子力显微镜(AFM)对掺磷纳米硅薄膜的微结构进行了分析,并对纳米硅薄膜的传导机制进行了探讨.结果表明:掺磷纳米硅薄膜由尺寸为2~4*#nm的晶粒和2~3个原子层厚的非晶界面构成,计算得到薄膜的晶态比为40%~55%.与本征纳米硅薄膜相比,掺磷纳米硅薄膜晶粒尺寸和晶态比没有明显变化,电导率却提高了2个数量级.随着掺磷浓度增加,纳米硅薄膜的晶粒尺寸、晶态比及电导率逐渐增大.AFM观察表明掺磷纳米硅薄膜由尺寸介于15~20*#nm的团簇构成,团簇排列具有带状特征.  相似文献   
2.
Some fundamental studies on the preparation, structure and optical properties of NbN films were carried out. NbN thin films were deposited by DC reactive magnetron sputtering at different N2 partial pressures and different substrate temperatures ranging from –50 ℃ to 600 ℃. X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM) were employed to characterize their phase com- ponents, microstructures, grain sizes and surface morphology. Optical properties inclusive of refractive indexes, extinction coefficients and transmittance of the NbN films under different sputtering conditions were measured. With the increase in the N2 partial pressure, δ-NbN phase structure gets forming and the grain size and lattice constant of the cubic NbN increasing. The deposited NbN film has relatively high values of refractive index and extinction coefficient in the wavelength ranging from 240 nm to 830 nm. Substrate tem- perature exerts notable influences on the microstructure and optical transmittance of the NbN films. The grain sizes of the δ-NbN film remarkably increase with the rise of the substrate temperature, while the transmittance of the films with the same thickness decreases. Ultra-fine granular film with particle size of several nanometers forms when the substrate is cooled to –50 ℃, and a remarkable aug- mentation of transmittance could be noticed under so low a temperature.  相似文献   
3.
The corrosion behavior of the nitinol alloy was studied in various corrosion media of different Cl–ion concentrations. The results demonstrate that the Cl–ion concentration has significant influences on the corrosion behavior of the nitinol alloy. In order to enhance the corrosion resistance, protective films were generated on the surface of the nitinol alloy by means of the electrochemical passivation method, for which five different electrolytic solutions were investigated. The surface analysis indicates full growth of all samples pas-sivated in the different electrolytic solutions with layers, however, showing different morphological features. Without any defects like micro-cracks and pores, the surface of the samples passivated in the molybdate solution turns out smoother and denser than those pas-sivated in other solutions. It is shown that the electro-chemical passivation will reduce Ni content but increase Ti content in the surface, reaching the Mole ratio of Ti:Ni=9.01:1 on the outermost surface. Potentiodynamic polarization test demonstrates that the samples electrochemically passivated in the molybdate solution present a significant increase in breakdown potential due to titanium enrichment on the outermost surface.  相似文献   
4.
掺杂纳米硅薄膜的生长特性   总被引:2,自引:0,他引:2  
采用等离子增强化学气相沉积(PECVD)方法成功的沉积出掺杂(主要是磷、硼)纳米硅薄膜.探讨了各种生长工艺条件对掺杂纳米硅薄膜的结构与性能的影响及其规律.利用高分辨电镜(HREM)、Raman散射等手段对掺入不同杂质后的纳米硅薄膜的微结构进行初步研究,并从实验和理论上对掺杂纳米硅薄膜的生长特性进行了探讨.得出掺杂纳米硅薄膜具有与掺杂非晶硅薄膜和掺杂微晶硅薄膜不同的生长特性,即杂质原子绝大部分是非活性的,只有很少一部分在薄膜中起施主作用.大部分非活性的杂质原子存在于晶粒间界.  相似文献   
5.
The TiO2-Co-TiO2 sandwich films were successfully grown on glass and silicon substrata making alternate use of radio frequency reactive magnetron sputtering and direct current magnetron sputtering. The structures and properties of these films were identified with X-ray diffraction (XRD), Raman spectra and X-ray photoemission spectra (XPS). It is shown that the sandwich film consists of two anatase TiO2 films with an embedded Co nano-film. The fact that, when the Co nano-film thickens, varied red shifts appear in optical absorption spectra may well be explained by the quantum confinement and tunnel effects. As for magnetic properties, the saturation magnetization, remnant magnetic induction and coercivity vary with the thickness of the Co nano-films. Moreover, the Co nano-film has a critical thickness of about 8.6 nm, which makes the coercivity of the composite film reach the maximum of about 1413 Oe.  相似文献   
6.
The electronic structures of the titanium dioxide(TiO2) doped with V and Fe were analyzed by using first-principle calculations based on the density functional theory(DFT) with the full potential linearized augmented plane wave method (FP-LAPW). The fully optimized structure and the relaxation introduced by impurity were obtained by minimizing the total energy and atomic forces. The unit cell of the V-doped anatase TiO2 is smaller than that of the non-doped one, but for the Fe-doped one, the case is just the opposite. It is found that the apical Ti-O and impurity-O bond lengths of the V/Fe-doped anatase TiO2 are greater than those of the non-doped structure, but smaller for the equatorial bond length. Through the band structures and the density of states, the V-doped TiO2 is shown to be a kind of half-metal, while the Fe-doped TiO2 a kind of metal. The magnetic moments of the V/Fe-doped system are mainly generated by the dopants. The results may be helpful for us to understand the experimental outcome of this system.  相似文献   
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