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工艺偏差对压阻式硅微压力传感器性能的影响 总被引:1,自引:0,他引:1
工艺实践表明,采用体硅湿法刻蚀工艺加工压阻式微型压力传感器时,敏感膜片会存在厚度偏差,电阻条偏离应力最大区域导致位置偏差,电阻条偏离期望的[110]晶向造成角向偏差.结合工艺实验并借助有限元法分析了上述几种主要工艺偏差对灵敏度、线性度等性能的影响.研究表明,2μm的厚度偏差会使灵敏度下降大约10%,线性度会明显下降;位置偏差会使敏感元件偏离应力最大区域而降低灵敏度:5°的电阻条角向偏差会使灵敏度下降大约3%.相关研究可为最大程度减小工艺偏差的影响提供参考依据. 相似文献
993.
Wei-Tou Ni 《Advances in Space Research (includes Cospar's Information Bulletin, Space Research Today)》2013
The detection of low frequency band (100 nHz–100 mHz) and very low frequency band (300 pHz–100 nHz) gravitational waves (GWs) is important for exploration of the equation of state of dark energy and the co-evolution of massive black holes (MBHs) with galaxies. Most galaxies are believed to have a massive black hole in the galactic core. In the formation of these black holes, merging and accretion are the two main processes. Merging of massive black holes generate GWs which could be detected by space GW detectors and Pulsar Timing Arrays (PTAs) to cosmological distances. LISA (Laser-Interferometric Space Antenna) is most sensitive to the frequency band 1 mHz–100 mHz, ASTROD-GW (ASTROD [Astrodynamical Space Test of Relativity using Optical Devices] optimized for Gravitational Wave detection) is most sensitive to the frequency band 100 nHz–1 mHz and PTAs are most sensitive to the frequency band 300 pHz–100 nHz. In this paper, we discuss the sensitivities and outlooks of detection of GWs from binary massive black holes in these frequency bands with an emphasis on ASTROD-GW. The GWs generated by the inspirals, merging and subsequent ringdowns of binary black holes are standard sirens to the cosmological distance. Using GW observations, we discuss the methods for determining the equation of state of dark energy and for testing the co-evolution models of massive black holes. ASTROD-GW is an optimization of ASTROD to focus on the goal of detection of GWs. The mission orbits of the 3 spacecraft forming a nearly equilateral triangular array are chosen to be near the Sun-Earth Lagrange points L3, L4 and L5. The 3 spacecraft range interferometrically with one another with arm length about 260 million kilometers. With 52 times longer in arm length compared to that of LISA, the strain detection sensitivity is 52 times better toward larger wavelength. The scientific aim is focused for gravitational wave detection at low frequency. The science goals include detection of GWs from MBHs, and Extreme-Mass-Ratio Black Hole Inspirals (EMRI), and using these observations to find the evolution of the equation of state of dark energy and to explore the co-evolution of massive black holes with galaxies. 相似文献
994.
Michael C.F. Bazzocchi Juan Miguel Sánchez-Lozano Houman Hakima 《Advances in Space Research (includes Cospar's Information Bulletin, Space Research Today)》2021,67(3):1155-1173
As private companies and government space agencies begin to seriously consider the task of active space debris removal, it is becoming increasingly more important to determine the highest priority objects to deorbit. This work sets forth an approach for prioritization of space debris through the utilization of Multi-Criteria Decision-Making methodologies and fuzzy logic, as well as both quantitative and qualitative criteria. The proposed debris prioritization approach considers various criteria including the orbit, size, mass, pairwise and total collision probabilities, and decay timeframe of each debris object. The means of assigning attributes to each assessment criterion is discussed in detail. To determine the weighting scheme for the criteria, a questionnaire was prepared and shared with experts in the field of space situational awareness. The work examines over two thousand critical debris objects selected from the existing debris catalog with respect to these criteria. The quantified attributes for each debris object are then aggregated through the fuzzy versions of the Analytic Hierarchy Process and the Technique for Order Preference by Similarity to Ideal Solution. The results of the analysis identify high-priority debris objects for removal from Earth-bound orbits. 相似文献
995.
提出了基于工作过程《机械制造技术》课程的理实一体化教学新思路及具体实施方案,并通过应用实例证明理实一体化教学相对传统教学方法的优越性。 相似文献
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连续变速颤振试验的采集信号通常为非平稳信号,其频率和幅值随时间变化,尤其在亚临界状态下, 变化程度十分剧烈。常用的非平稳信号时变参数建模分析方法,在信号非平稳程度较高的情况下难以对信号 的模态进行准确地分析和跟踪。为了解决这一问题,结合信号非平稳度量计算方法,提出一种改进的自适应粒 子滤波算法,并通过仿真实验数据对所提算法在高非平稳度情况下的跟踪性能进行验证。结果表明:与一般粒 子滤波算法相比,本文方法在高非平稳度情况下具有更高的跟踪精度。 相似文献