Luminescent Nanocrystalline Silicon Carbide Thin Film Deposited by Helicon Wave Plasma Enhanced Chemical Vapour Deposition

Hydrogenated nanocrystalline silicon carbide (SiC) thin films were deposited on the single-crystal silicon substrate using the heli-con wave plasma enhanced chemical vapor deposition (HW-PECVD) technique. The influences of magnetic field and hydrogen dilution ratio on the structures of SiC thin film were investigated with the atomic force microscopy (AFM), the Fourier transform infrared ab-sorption (FTIR) and the transmission electron microscopy (TEM). The results indicate that the high plasma activity of the helicon wave mode proves to be a key factor to grow crystalline SiC thin films at a relative low substrate temperature. Also, the decrease in the grain sizes from the level of microcrystalline to that of nanocrystalline can be achieved by increasing the hydrogen dilution ratios. Transmis-sion electron microscopy measurements reveal that the size of most nanocrystals in the film deposited under the higher hydrogen dilution ratios is smaller than the doubled Bohr radius of 3C-SiC (approximately 5.4 nm), and the light emission measurements also show a strong blue photoluminescence at the room temperature, which is considered to be caused by the quantum confinement effect of small-sized SiC nanocrystals.     

Design and Coupled Thermo-Mechanical Analysis of Silicon Carbide Primary Mirror Assembly

Based on the principle that the thermal expansion coefficient of the support structure should match that of the mirror, three schemes of primary mirror assembly were designed. Of them, the first is fused silica mirror plus 4J32 flexible support plus ZTC4 support back plate, the second K9 mirror plus 4J45 flexible support plus ZTC4 support back plate, and the third SiC mirror plus SiC rigid support back plate. A coupled thermo-mechanical analysis of the three primary mirror assemblies was made with finite element method. The results show that the SiC assembly is the best of all schemes in terms of their combination properties due to its elimination of the thermal expansion mismatch between the materials. The analytical results on the cryogenic property of the SiC primary mirror assembly show a higher surface finish of the SiC mirror even under the cryogenic condition.     

C形、中空截面碳化硅纤维的成形工艺研究

以聚碳硅烷(PCS)为原料，经C形喷丝板熔融纺丝制备C形、中空截面PCS原丝后，再经不熔化和高温烧成后得到C形、中空截面SiC纤维。文中讨论了纺丝温度、N2压力和收丝速度对两种PCS纤维当量直径和异形度的影响，以及不熔化和烧成工艺对SiC纤维截面形状的影响。结果表明，纺丝温度对C形、中空PCS纤维当量直径和异形度影响较大；合适的纺丝工艺和不熔化及烧成条件下可以得到高异形度低当量直径的C形、中空截面SiC纤维。     

精密磨床的研制与开发

介绍一种用单片机系统控制的精密磨床的研制与开发。     

机床振动对高精度金刚石刀具研磨质量的影响

研磨机床的振动是影响金刚石刀具机械研磨质量的重要因素,尤其在精密研磨工序。为了提高金刚石刀具的研磨质量,针对金刚石刀具的精密研磨工序,在研磨加工时对机床施加空气隔振垫,使研磨的金刚石刀具切削刃钝圆半径从隔振前的93.8nm降到了隔振后的72.7nm,前刀面表面粗糙度则从2.4nm降到了1.0nm,研磨质量得到明显改善。     

UNIX下报表技术研究及报表工具开发

提出并讨论了UNIX下报表工具需要解决的三个核心问题:报表数据,报表格式和报表输出。构造了一个报表工具模型。在该模型中,引入了报表数据定义语言和报表格式描述语言,用相应的解释器解释它们。最后,以文中的报表工具模型为基础,实现了一个UNIX下的报表工具。     

三维碳/碳化硅复合材料的显微结构与力学性能

 利用三维碳纤维预制体，采用等温CVI法制备连续碳纤维增韧碳化硅陶瓷基复合材料。无热解碳界面层的复合材料，其力学性能随密度的增加而提高，但密度较高时却表现出脆性断裂特征。热解碳界面层的存在，有利于纤维的拔出，但由于其结晶程度较低，仍然存在纤维束内部的脆性断裂。     

一种基于双向线性插值的求交算法及其应用

提出了一种基于双向线性插值原理的参数曲面与平面求交方法,并应用它来求解零件曲面偏置表面与导动平面的交线,处理偏置表面的非唯一性问题,最终生成一条高效而无干涉的ＮＣ加工刀具轨迹。     

基于解调测量法的加工中心刀具检测系统

分析了用硬件解调测量法进行刀具边缘轮廓特征点提取的原理和方法,给出了一种基于该方法的,具有刀形检测功能的二维视觉刀具检测系统。并给出了形成刀具测量参数的数学模型及测量实验数据     

高温耐热合金 GH169 的深小孔钻削加工性

研究了高速钢麻花钻头、硬质合金钻头和电沉积ＣＢＮ高速钢钻头钻削高温耐热合金ＧＨ１６９,其横刃部分采用“Ｓ”型的修磨结构时钻削深小孔的性能,并优化了钻头横刃的修磨等几何参数和切削参数。实验表明：采用硬质合金钻头或电沉积ＣＢＮ钻头钻削高温耐热合金ＧＨ１６９是切实可行的。而且改善了加工条件,提高了加工质量和生产效率。