基于微电铸工艺的摩擦接触式微型惯性开关

针对微型惯性开关闭合时间短、接触弹跳问题,设计了增强接触效果的摩擦接触式微型惯性开关.基于MEMS惯性开关工作原理,建立了开关物理模型,研究了不同类型惯性开关的闭合性能,提出了增强接触的摩擦接触方法,设计了摩擦接触式微型惯性开关的结构.为了对比接触性能,基于UV–LIGA叠层光刻和精密微电铸工艺,研制了3种不同类型的惯...     

Laser-induced oxidation assisted micro milling of high aspect ratio microgroove on WC-Co cemented carbide

Severe tool wear and poor surface quality are the main problems during micro machining of cemented carbide. In this work, an innovative hybrid process of laser-induced oxidation assisted micro milling (LOMM) was proposed to solve the problems. A nanosecond laser was utilized to induce oxidation of the WC-20%Co material, producing loose oxide which was easy to remove. The micro machinability of the material was improved by laser-induced oxidation. The oxidation mechanisms of cemented carbide were studied. A microgroove with a depth of 2.5 mm and aspect ratio of 5 was fabricated successfully. The milling force, surface quality and tool wear mechanisms were investigated. For comparison, a microgroove was also fabricated with conventional micro milling (COMM) using identical milling parameters. Results revealed that in LOMM the milling force and tool wear rate were extremely low during removing the oxide. The machined surface quality and dimensional accuracy achieved by LOMM were superior to those obtained by COMM. The surface roughness S_a of the microgroove bottom reached 88 nm in LOMM, while the cross-sectional geometry of the microgroove was a trapezoid. Perpendicularity of the microgroove sidewall machined by LOMM was better than that by COMM. The tool wear forms in LOMM were coating spalling and slight tool nose breakage. Compared with COMM, the tool life in LOMM was prolonged significantly. It indicates that the proposed hybrid process is an effective and efficient way to fabricate high aspect ratio micro-features with high dimensional accuracy.     

碳纳米管阵列推力器放电特性的数值模拟研究

基于直接蒙特卡洛(DSMC)算法、浸入式有限元算法(IFE)、粒子云及蒙特卡洛碰撞(PIC-MCC)算法以及Ammosov-Delone-Krainov(ADK)隧穿电离模型建立了碳纳米管阵列推力器工质气体和CNT场电离过程的三维仿真模型。利用文献中的实验数据对本文仿真模型的有效性进行了验证,结果表明本文仿真模型与实验结果基本一致。针对碳纳米管阵列推力器的放电特性进行了研究,并重点分析了离子与原子碰撞过程对碳纳米管阵列推力器放电特性的影响。结果表明CNT可以极大地增强局部电场,稳态时场增强因子约为1308;与原子的碰撞使得离子在CNT附近更加集中,降低了局部电场,进而降低了其场增强能力。     

X 射线 CT 技术在 C/ C 复合材料研究中的应用

分析了X射线CT技术的基本原理和成像模式,综述了X射线CT技术在C/C复合材料的密度测量、孔隙率、孔隙形状和分布等量化表征中的应用。同时介绍了X射线CT图像在C/C复合材料力学性能预测和裂纹扩展规律研究中的应用。     

编队队形的等交点周期设计方法

在分析编队构形一般设计方法设计效果的基础上，提出一种等交点周期法，对一般方法进行了改进。该法编队中卫星以一个相等的角速率运行在轨道上，能实现长期的编队飞行，并给出了编队设计算例及J2摄动下的队形演变，仿真表明，用等交点周期法设计的构形，能部分地消除J2摄动的影响。     

准LIGA技术的研究与发展

介绍近年来准ＬＩＧＡ技术发展的概况，着重讨论国内外对它的各个工艺过程所采取的一些措施及其在微传感器和微执行器中的应用，并简单论述它的发展趋势。     

可压缩流体恒温热线风速仪校准方法

开展了恒温(CT)热线风速仪校准方法的研究,以满足可压缩流体中湍流度测量需求。将对数函数与多元回归技术相结合,建立了恒温热线风速仪校准的数学模型,并进行了风洞湍流度测量试验验证。在马赫数Ma=0.3~0.55范围内进行了校准试验,根据建立的数学模型对试验数据进行拟合,拟合优度R2=0.999 82,平均绝对速度偏差Δu=0.18m/s,基本满足了恒温热线风速仪校准精度要求。对马赫数Ma=0.55条件下流场进行了湍流度测量,速度测量偏差为0.034%,流场湍流度Tu=0.14%。试验结果证明了恒温热线风速仪应用于可压缩流体速度测量的可行性。     

飞轮振源特征参数提取方法及其分布特性

为了从飞轮微振动输出中提取飞轮转子的振源信息，提出利用鲁棒回归辨识飞轮在升速过程中各主要阶次的振幅对转速的二次幂系数，并将其作为飞轮的振源幅值特征参数；为探究参数的分布特性，利用Weibull分布拟合多个飞轮在同一阶次的特征参数，并计算出特定概率点的分位数。振源特征参数的分位数既系统地展示了飞轮振源分布情况，亦可作为振源分级判据。将该方法成功应用于50 Nms飞轮的振源特征参数分布研究中，为该型飞轮的超静性能筛选和设计改进提供了判定准则和参考依据。     

A new inversion method of plasma density distribution of plasmasphere in the geomagnetic equatorial plane from IMAGE data

The plasma density distribution of plasmasphere in the geomagnetic equatorial plane can help us study the magnetosphere like plasmasphere, ionosphere and their kinetics. In this paper, we introduce a new inversion method, GE-ART, to calculate the plasma density distribution in the geomagnetic equatorial plane from the Extreme Ultraviolet (EUV) data of IMAGE satellite under the assumption that the plasma density is constant along each geomagnetic field line. The new GE-ART algorithm was derived from the traditional Algebraic Reconstruction Techniques (ART) in Computed Tomography (CT) which was different from the several existing methods. In this new method, each value of the EUV image data was back-projected evenly to the geomagnetic field lines intersected by this EUV sight. A 3-D inversion matrix was produced by the contributions of all the voxels contained in the plasmasphere covered by the EUV sensor. That is, we considered that each value of the EUV image data was relative to the plasma densities of all the voxels passed through by the corresponding EUV radiation, which is the biggest difference to all the existing inversion methods. Finally, the GE-ART algorithm was evaluated by the real EUV data from the IMAGE satellite.     

微喷管内声速点位置及临界压比

为提高微型空间推进器和微型气体涡轮机等微型器件的性能,利用有限体积法求解二维可压缩N-S方程模拟了扩张比为1.7的收缩-扩张微喷管内部的流场结构和温度分布,研究了尺度效应对微喷管内部流场结构的影响,计算中微喷管的喉部宽度为1～200μm.数值结果表明：在扩张比和进出口压力相同的条件下,微喷管出口马赫数随着微喷管尺度的减小而减小.微喷管内首次出现声速点的位置随着喷管尺度的缩小从喷管喉部逐渐移向喷管出口,临界压比值随着喷管尺度的减小而减小.