硅半球深腔结构无损检测技术

半球深腔的加工质量是决定硅基MEMS半球陀螺精度的关键因素之一，及时检测半球深腔的形貌参数并将其反馈至加工过程，是确保高性能MEMS半球陀螺研制成功的重要措施。由于硅半球深腔的深度较大，台阶仪和光学显微成像系统无法对半球深腔的形貌特征进行有效测量。因此,需要将硅深腔结构剖开后采用扫描电镜(SEM)进行检测。这种检测方式时间周期长，且属于破坏性的样本检测，效率和测试精度都较低。提出以硅半球深腔为模具，利用PDMS铸模将硅半球深腔的结构尺寸和表面形貌转移到PDMS凸起的半球模型上，通过检测PDMS半球模型的尺寸结构和表面形貌，即可反推出硅半球深腔的尺寸特征。经实验验证，脱模后的PDMS模型可以准确地反映出半球深腔的尺寸信息，测量结果的不确定度小于5‰，有效解决了硅半球深腔无损检测的难题。     

High temporal resolution global PWV dataset of 2005–2016 by using a neural network approach to determine the mean temperature of the atmosphere

Atmospheric water vapour plays an important role in phenomena related to the global hydrologic cycle and climate change. However, the rapid temporal–spatial variation in global tropospheric water vapour has not been well investigated due to a lack of long-term, high-temporal-resolution precipitable water vapour (PWV). Accordingly, this study generates an hourly PWV dataset for 272 ground-based International Global Navigation Satellite System (GNSS) Service (IGS) stations over the period of 2005–2016 using the zenith troposphere delay (ZTD) derived from global-scale GNSS observation. The root mean square (RMS) of the hourly ZTD obtained from the IGS tropospheric product is approximately 4 mm. A fifth-generation reanalysis dataset of the European Centre for Medium-range Weather Forecasting (ECMWF ERA5) is used to obtain hourly surface temperature (T) and pressure (P), which are first validated with GNSS synoptic station data and radiosonde data, respectively. Then, T and P are used to calculate the water vapour-weighted atmospheric mean temperature (Tm) and zenith hydrostatic delay (ZHD), respectively. T and P at the GNSS stations are obtained via an interpolation in the horizontal and vertical directions using the grid-based ERA5 reanalysis dataset. Here, Tm is calculated using a neural network model, whereas ZHD is obtained using an empirical Saastamoinen model. The RMS values of T and P at the collocated 693 radiosonde stations are 1.6 K and 3.1 hPa, respectively. Therefore, the theoretical error of PWV caused by the errors in ZTD, T and P is on the order of approximately 2.1 mm. A practical comparison experiment is performed using 97 collocated radiosonde stations and 23 GNSS stations equipped with meteorological sensors. The RMS and bias of the hourly PWV dataset are 2.87/?0.16 and 2.45/0.55 mm, respectively, when compared with radiosonde and GNSS stations equipped with meteorological sensors. Additionally, preliminary analysis of the hourly PWV dataset during the EI Niño event of 2014–2016 further indicates the capability of monitoring the daily changes in atmospheric water vapour. This finding is interesting and significant for further climate research.     

用于低温试验的多通道高精度铂电阻测温电路

在低温推进剂蒸发量控制等低温试验中,高精度的温度测点数量多,并且要求必要时屏蔽失效的测点,导致调理电路成本较高。为解决上述问题,设计了一种适用于低温试验多通道温度测量的铂电阻测温电路。设计了恒流源电路、放大滤波电路。利用ATMega328P和串口屏开发了通道控制和人机交互界面。用于测温的多个铂电阻与已知参考电阻以同一个恒流源串联供电,通过比例式测量消除了恒流源性能对测量精度的影响。误差分析和测试校准证明其电阻测量精度达到0.05%,可广泛应用于实验室和试验现场的低温测量系统中。     

低速大转矩永磁游标电机在发酵罐中的应用

采用秸秆生产丁醇时,为了达到高效率发酵,需要使发酵液中菌体分布均匀,所加物料需要及时搅拌。工业化生产丁醇的发酵罐尺寸较大,搅拌过程对驱动电机的输出转矩要求较高,因此高效率、小体积、低速大转矩的秸秆发酵搅拌电机对工业化发酵生产丁醇意义重大。设计了一种定转子永磁游标电机用于发酵液搅拌,并对电机的槽极数、电磁性能进行了具体的研究。制造样机并采用滞环控制实现了对液态发酵对象的快速响应,且实现了低能耗、高效率的发酵过程。     

Geometric error analysis of an over-constrained parallel tracking mechanism using the screw theory

This paper deals with geometric error modeling and sensitivity analysis of an overconstrained parallel tracking mechanism. The main contribution is the consideration of overconstrained features that are usually ignored in previous research. The reciprocal property between a motion and a force is applied to tackle this problem in the framework of the screw theory. First of all, a nominal kinematic model of the parallel tracking mechanism is formulated. On this basis, the actual twist of the moving platform is computed through the superposition of the joint twist and geometric errors. The actuation and constrained wrenches of each limb are applied to exclude the joint displacement. After eliminating repeated errors brought by the multiplication of wrenches, a geometric error model of the parallel tracking mechanism is built. Furthermore,two sensitivity indices are defined to select essential geometric errors for future kinematic calibration. Finally, the geometric error model with minimum geometric errors is verified by simulation with SolidWorks software. Two typical poses of the parallel tracking mechanism are selected, and the differences between simulation and calculation results are very small. The results confirm the correctness and accuracy of the geometric error modeling method for over-constrained parallel mechanisms.     

A shortcut to marking 3D target curves on curved surface via a galvanometric laser scanner

Marking arbitrary three-dimensional(3D) target curves on given objects with curved surface is required in many industrial fields, such as fabric prepreg placement in composite material part fabrication, product assembly, surface painting for decoration, etc. A shortcut to the solution of this intractable problem is proposed by utilizing a galvanometric laser scanner(GLS) with the aid of a camera. Without using the existing tedious GLS calibration procedures,the proposed method directly establishes a mapping between the 3D coordinates of the laser spots on the object surface and the control voltages of the scanner. A single-hidden layer feedforward neural network(SLFN) is employed to model the mapping. By projecting a dense grid of laser spots on the object to be marked and simultaneously taking only one image, the SLFN model is trained in minutes via a linear solving mechanism. Experiments demonstrate that the trained SLFN model has a good generalization performance for marking 3D target curves. The 3D laser marking errors on experimental objects are less than 0.5 mm. The proposed method is especially suitable for on-site use and can be conveniently extended to multiple GLSs for marking large complex objects.     

黄渤海晴空像元下雾霾识别的机器学习算法

为实时有效地识别和监测雾霾，选取2013年10月4日与10月5日的两景MODIS遥感图像，利用不同类型像元的光谱差异，基于神经网络模型，建立海上雾霾的遥感识别机器学习算法。经检验表明，在晴空条件下，机器学习算法反演精度相对较高，已超过98%，利用算法可以实现对中国近海上空雾霾的监测。