软X射线投影光刻的关键技术

1．多层膜反射镜是投影光刻得以实现的前提．必须解决多层膜的高反射率、带宽匹配、应力，曲面基板上膜厚随入射角变化而变化等关键问题．目前，Mo／Be和Mo／Si多层膜在11～14mm波段得到了接近70％的反射率。2．光学元件超精密加工与检测是投影光刻得以实现的另一大基础。软X射线投影光刻所用的光学元件不仅要有较高的面形精度，而且要有较低的表面粗糙度。美国Tinsley公司现在能加工面形误差精度达0．6nm的元件，这是目前世界上最高的光学加工水平。为检测所加工元件的面形误差，该公司采用了精密干涉测量法、STM和AFM技术等当今最先…     

大口径光学元件的精密磨抛与检测装备开发及应用

大口径光学元件超精密加工是一个复杂的系统性工程,涉及精密机床、数控、加工技术与工艺、精密检测和补偿控制等机电控各领域的专业知识,其发展与一个国家的高端制造技术及装备发展能力息息相关,也是一个国家综合国力的集中体现。主要介绍了厦门大学微纳米加工与检测联合实验室在大口径光学元件超精密加工技术及装备方面取得的研究进展,针对大口径光学元件磨削和抛光两个加工流程及其配套的精密检测技术,详细阐述了磨削装备及单元技术、可控气囊抛光机床及相关单元技术、精密检测装备及相关单元技术等的研究应用情况。这些技术研究从超精密加工的需求出发,借鉴国内外的研究经验和成果,通过对装备、工艺、检测等各方面整合,形成了具有自主知识产权的集磨削、抛光和检测装备及工艺技术的大口径光学元件超精密加工体系,这些技术与装备确保了大口径光学元件的高质量超精密加工。     

复杂曲面铝反射镜磁流变抛光工艺优化

采用超精密车削加工的复杂曲面铝反射镜只能满足红外光学系统的应用需求,若要满足更高需求的应用场合,需要进一步提升反射镜面形精度。磁流变抛光能够进行确定性修形,在复杂曲面加工中具有独特优势,但是复杂曲面连续变化的面形特征,在磁流变抛光时会导致去除函数不稳定,影响误差收敛效率和加工精度。从高精度复杂曲面铝反射镜的应用需求出发,提出了复杂曲面局部区域磁流变抛光去除函数的动态建模方法,给出了驻留时间求解算法,以平均曲率变化最小为原则,设计了抛光路径优化算法,针对该算法计算速度慢的问题,提出了优化策略,并通过试验进行了验证,最终加工的复杂曲面铝反射镜的面形误差为0.216λ PV、0.033λ RMS （λ=632.8 nm）。     

Zernike自由曲面加工轨迹规划研究

Zernike自由曲面光学元件加工复杂,采用单点金刚石慢刀伺服车削方法可以实现自由曲面光学元件的高效、高精度制造。本文针对慢刀伺服车削Zernike自由曲面刀具等角度法和等弧长法两种车削轨迹划分方法进行研究,并选择等角度法轨迹划分进行车削工艺实验,获得了口径50mm的Zernike自由曲面光学元件,面形精度PV0.9506μm。     

国内首台工程实用化超精密非球面加工机床

非球面曲面超精密复合加工系统是具备金刚石车削、铣削和磨削功能的CNC超精密加工系统,用于平面、球面及非球面光学零件的超精密加工。加工面形精度PV=0.228μm,表面粗糙度Ra=0.0078μm。该系统的研制成功,标志着我国在本领域的研究已跨入实用化、工程化的阶段,研究项目进入国际先进行列。国内首台工程实用化超精密非球面加工机床     

科技成果

我国先进制造技术取得新突破 日前,由中国航空精密机械研究所研制的非球面曲面超精密加工机床成功交付用户。 非球面曲面超精密加工机床具备超精密金刚石车削、铣削功能和超精密金刚石砂轮磨削功能及其他相应辅助功能,主要用于完成超精密平面、球面以及包括非球面曲面等在内的复杂面形光学零件的超精密加工。     

实现太赫兹波高透射率的微结构超精密加工技术

为针对提高太赫兹波透射率的需求,开展基于离子注入表面改性的脆性材料微结构超精密加工技术的研究,并将其应用于太赫兹波产生用磷化镓微棱锥结构的应用中。通过蒙特卡洛模拟指导注入参数,对比脆塑转变深度验证机械加工效果,成功加工出符合应用要求的微结构。通过光学测试,该方法能够有效提高加工效率,改善加工质量,实现对脆性光学材料的一次成型加工。     

《航空精密制造技术》2003年总目录

◇精密加工基于超声研磨的超精密加工………………………………(1)精密加工中非球面工件面形精度的在机测量……………(1)基于小型三坐标测量机的机械研究………………………(1)超光滑表面清洗技术现状及其发展趋势…………………(2)激光陀螺超光滑反射镜基片的光学加工和检测技术……(2)光纤连接器超精密加工技术的研究………………………(3)智能材料在微机械中的应用及发展………………………(3)超精密车削表面三维微观形貌仿真及特征分析…………(4)卫星轴承钢珠精化技术研究………………………………(4)基于AFM电场诱导氧化的纳米加工…     

非球面模芯ELID磨削技术研究

采用铸铁结合剂、CBN砂轮,利用ELID磨削加工技术,对GCr15轴承钢的磨削性能进行实验研究;并利用自行开发的非球面数控磨削系统,对GCr15材料非球面模芯进行超精密数控磨削加工,加工后工件表面粗糙度Ra36nm,面形精度小于5μm。     

超精密加工技术的发展

以单点金刚石车削和超精密金刚石磨削为基础的超精密加工能够经济地制造光学、机械和电子部件,或生产在微米和毫微米范围内的成形精度和表面粗糙度的产品。辅助成形精度和表面粗糙度测量技术在评估超精密加工表面质量中也起着重要作用。在香港建立了超精密加工中心,用各种设备和技术服务帮助当地企业对高质量超精密产品进行快速研制和试验超精密加工技术的发展     

The effect of inlet conditions on the flow and heat transfer in multiple rotating cavity with axial throughflow

This paper discusses experimental results from two different build configurations of a heated multiple rotating cavity test rig.Measurements of heat transfer from the discs and tangential velocities are presented.The test rig is a 70% full scale version of a high pressure compressor stack of an axial gas turbine engine.Of particular interest are the internal cylindrical cavities formed by adjacent discs and the interaction of these with a central axial throughflow of cooling air.Tests were carried out for a range of non-dimensional parameters representative of high pressure compressor internal air system flows(Re up to 5×106 and Rez up to 2×105).Two different builds have been tested.The most significant difference between these two build configurations is the size of the annular gap between the(non-rotating) drive shaft and the bores of the discs.The heat transfer data were obtained from thermocouple measurements of surface temperature and a conduction solution method.The velocity measurements were made using a two component,LDA system.The heat transfer results from the discs show differences between the two builds.This is attributed to the wider annular gap allowing more of the throughflow to penetrate into the cavity.There are also significant differences between the radial distributions of tangential velocity in the two builds of the test rig.For the narrow annular gap,there is an increase of non-dimensional tangential velocity V/Ωr with radial location to solid body rotation V/Ωr=1.For the wider annular gap,the non-dimensional velocities show a decrease with radial location to solid body rotation.      

Research on Auto-detection for Remainder Particles of Aerospace Relay Based on Wavelet Analysis

Aerospace relay is one kind of electronic components which is used widely in national defense system and aerospace system. The existence of remainder particles induces the reliability declining, which has become a severe problem in the development of aerospace relay. Traditional particle impact noise detection (PIND) method for remainder detection is ineffective for small particles, due to its low precision and involvement of subjective factors. An auto-detection method for PIND output signals is proposed in this paper, which is based on direct wavelet de-noising (DWD), cross-correlation analysis (CCA) and homo-filtering (HF), the method enhances the affectiv-ity of PIND test about the small particles. In the end, some practical PIND output signals are analysed, and the validity of this new method is proved.     

Preparation of Highly Dispersed Antimony-doped Tin Oxide Nano-powder via Ion-exchange Hydrolysis of SnCl4 and SbCl3 and Azeotropic Drying

Antimony-doped tin hydroxide colloid precipitates have been synthesized by hydrolysis of SnCl4 and SbCl3 using: (1) an ion-exchange hydrolysis to remove chlorine ions, and (2) isoamyl acetate as an azeotropic solvent to obviate water. The obtained dried powder is of high dispersivity without any need for further grinding. The size and dispersivity of the final particles are investigated with the aid of TG-DTA, BET, XRD and TEM. After having calcined, the antimony-doped tin oxide nanopowder possesses a tetragonal rutile structure with high dispersivity, uniform particles and low hard agglomeration.     

Effects of Mo on the Microstructure and Hydrogen Sorption Properties of Ti-Mo Getters

The effects of Mo on the microstructure evolution, porosity and hydrogen sorption properties of Ti-Mo getters are investigated in this work. The results show that the addition of Mo prolongs the densification process of Ti-Mo getters and results in a significant amount of sintered pores. With the Mo content increasing, the porosity of getters firstly increases reaching the maximum value as it at- tains about 7.5wt.%, and then drops. At the room temperature, the hydrogen sorption property of getters increases progressively with the Mo content increasing, but the tendency is not very clear before its content lies below 2.5wt.%. When the Mo content achieves about 7.5wt.%, the hydrogen sorption property proves to be the best. The discussion is made about the above mentioned phenomena inclusive of hydrogen sorption properties of getters under different activation conditions (from 500-750 ℃).     

超声速燃烧数值模拟中的湍流与化学反应相互作用模型

高精度数值模拟有助于理解超声速湍流燃烧中湍流与化学反应的相互作用,可为发动机燃烧室等工程应用设计提供可靠的预测模型。除直接数值模拟外,目前在湍流燃烧应用中使用的大涡模拟和雷诺平均Navier-Stokes模拟均需要借助模型模化发生在湍流小尺度上的流动与化学反应过程对湍流大尺度运动的影响。现有的湍流与化学反应相互作用模型大致可分为:火焰面类模型和概率密度函数类模型,2类模型在不同的应用中各自具有优势和局限性。此外,现有模型大都基于低马赫数燃烧,而超声速燃烧中通常会伴随快速混合、局部熄火和再着火以及激波等复杂过程,这为发展其中的湍流与化学反应相互作用模型提出了更多的挑战。     

适于低轨卫星IP网络的单核共享树组播算法(英文)

为了解决低轨卫星IP网络中现有典型源组播算法的信道资源浪费问题,本文提出了一套单核共享树组播算法,即核心群合并共享树(CCST)和加权核心群合并共享树(w-CCST)算法。CCST 算法包括动态近似中心(DAC)选核方法和核心群合并组播路径构建方法。DAC方法专为周期、规律运动的低轨卫星网络提出,不需要复杂的星上计算。在核心群合并方法中,以核节点作为初始核心群,通过核心群和剩余组成员的最短路径方法逐步扩展直至整棵组播树构建完成,从而使得组播树的树代价最小,大大提高了网络的带宽利用率和组播传输效率。w-CCST 算法中所提出的加权因子可以调整树代价和端到端传播时延之间的折衷程度,因此,可以通过调整加权因子来适度增大树代价、降低端到端传播时延以支持某些端到端时延要求苛刻的实时组播业务。最后,与低轨卫星 IP 网络中典型算法进行了性能比较,仿真结果说明,CCST 算法的平均树代价比其它算法显著降低,w-CCST 算法的平均端到端传播时延小于 CCST 算法。     

Jet Vectoring Control Using a Novel Synthetic Jet Actuator

A primary air jet vectoring control system with a novel synthetic jet actuator (SJA) is presented and simulated numerically. The results show that, in comparison with an existing traditional synthetic jet actuator, which is able to perform the duty of either “push” or “pull”, one novel synthetic jet actuator can fulfill both “push” and “pull” functions to vector the primary jet by shifting a slide block inside it. Therefore, because the new actuator possesses greater efficiency, it has potentiality to replace the existing one in various appli- cations, such as thrust vectoring and the reduction of thermal signature. Moreover, as the novel actuator can fulfill those functions that the existing one can not, it may well be expected to popularize it into more flow control systems.     

Nonlinear Adaptive Slewing Motion Control of Spacecraft Truss Driven by Synchronous V-gimbaled CMG Precession

The slewing motion control of a truss arm driven by a V-gimbaled control-moment-gyro (CMG) is a nonlinear control problem. The V-gimbaled CMG consists of a pair of gyros that must precess synchronously. The moment of inertia of the system, the angular momentum of the gyros and the external disturbances are not exactly known. With the help of feedback linearization and recursive Lyapunov design method, an adaptive nonlinear controller is designed to deal with the unknown items. Performance of the proposed controller is verified by simulation.     

An SOR Implicit Time-accurate Scheme in Calculating Unsteady Flows

A new time-accurate marching scheme for unsteady flow calculations is proposed in the present work. This method is the combination of classical Successive Over-Relaxation (SOR) iteration method and Jacobian matrix diagonally dominant splitting method of LUSGS. One advantage of this algorithm is the second-order accuracy because of no factorization error. Another advantage is the low computational cost because the Jacobian matrices and fluxes are only calculated once in each physical time step. And, the SOR algorithm has better convergence property than Gauss-Seidel. To investigate its accuracy and convergency, several unsteady flow computa- tional tests are carried out by using the proposed SOR algorithm. Roe’s FDS scheme is used to discritize the inviscid flux terms. Un- steady computational results of SOR are compared with the experiment results and those of Gauss-Seidel. Results reveal that the numerical results agree well with the experimental data and the second-order accuracy can be obtained as the Gauss-Seidel for unsteady flow computations. The impact of SOR factor is investigated for unsteady computations by using different SOR factors in this algorithm to simulate each computational test. Different numbers of inner iterations are needed to converge to the same criterion for different SOR factors and optimal choice of SOR factor can improve the computational efficiency greatly.