Sol—GelTiO2薄膜的氮化研究

探讨了一种制备多孔性氮化钛薄膜的新方法。以钛酸正丁酯ＴＩＲ为前驱物,通过溶胶－凝胶（ｓｏｌ＿ｇｅｌ）过程可在不锈钢等基体材料表面涂覆一定厚度的ＴｉＯ２凝胶膜。Ｘ－射线衍射分析（ＸＲＤ）表明,以ＮＨ３气作为氮化气氛,能完成在ＴｉＯ２薄膜到ＴｉＮ薄膜的转变。     

有机废水的TiO2光催化氧化处理技术浅析

TiO2以优良的催化性能，被有机废水处理领域日益广泛采用。本文对TiO2光催化氧化技术的研究发展进程作了概要综述，并对该技术在有机污水处理领域的应用作了阐述，对实际工作具有一定的指导意义。     

多弧离子镀Cr/Cr2O3薄膜红外及可见光谱特性

采用多弧离子镀制备了具有不同色彩的Cr/Cr2O3薄膜,利用紫外-可见光分光光度计研究了薄膜在可见和红外波段的光谱特性,利用SEM进行薄膜表面结构和形貌的分析,利用四探针测阻仪测试了样品的方块电阻,利用红外发射率测量仪测试了样品的红外发射率。结果表明:Cr/Cr2O3薄膜具有丰富的色彩,在可见光区有明显的反射峰,可见光区光谱特性主要受膜厚的影响,方块电阻随膜厚增加而有变大,样品的红外发射率主要取决于金属层,平均红外发射率最小降至0.371。     

Magnetic and Optical Properties of the TiO2-Co-TiO2 Composite Films Grown by Magnetron Sputtering

The TiO2-Co-TiO2 sandwich films were successfully grown on glass and silicon substrata making alternate use of radio frequency reactive magnetron sputtering and direct current magnetron sputtering. The structures and properties of these films were identified with X-ray diffraction (XRD), Raman spectra and X-ray photoemission spectra (XPS). It is shown that the sandwich film consists of two anatase TiO2 films with an embedded Co nano-film. The fact that, when the Co nano-film thickens, varied red shifts appear in optical absorption spectra may well be explained by the quantum confinement and tunnel effects. As for magnetic properties, the saturation magnetization, remnant magnetic induction and coercivity vary with the thickness of the Co nano-films. Moreover, the Co nano-film has a critical thickness of about 8.6 nm, which makes the coercivity of the composite film reach the maximum of about 1413 Oe.     

SiO_2溶胶在电沉积法制备CuInS_2薄膜中的作用

针对目前电沉积法制备的CuInS_2(CIS)薄膜存在S元素含量不足以及微观形貌差的问题,通过在普通镀液中加入SiO_2溶胶,采用一步电沉积技术在ITO导电玻璃上制备Cu-In-S预制薄膜,镀液的主要组成为金属盐、硫代硫酸钠和不同浓度SiO_2溶胶.在空气气氛中对Cu-In-S预制薄膜进行退火处理以获得多晶的CIS薄膜,并通过X射线衍射(XRD)、扫描电镜(SEM)、能量色散谱仪(EDS)及开路电位对CIS薄膜的结构、形貌、成分组成及光响应性能进行研究.结果表明:SiO_2溶胶浓度为4 mL/L时,得到的CIS薄膜的结晶度提高,同时,SiO_2溶胶作用下得到的CIS薄膜的表面形貌、成分组成和光响应性能都得到改善.因此,镀液中加入SiO_2溶胶有利于提高CIS薄膜的性能,尤其是浓度为4 mL/L时,性能提高得最为明显.     

Study on the Microstructure and Dielectric Properties of Barium Strontium Titanate Thin Films Prepared by Sol-gel Method

Sr05Ba0.5-xBixTiO3 （BST） thin films were fabricated on a Pt/SiO2/Si substrate by the sol-gel method. Then follows an investigation of the influeoces of bismuth （Bi） on the microstructures and the dielectric properties of Sr0.5Ba0.5-xBixTiO3 （BST） thin films. The microstructures of the BST thin films were examined by the XRD and the TEM techniques. Tetragonal perovskite crystal grains were observed in BST thin films. Increasing Bi^3＋ doping ration in BST will lead to decrease of the grain size. It is found that Bi^3＋ doping decreases the dielectric loss and improves the frequency dispersion of the BST thin films. Not only is compressed the peak of temperature-dependence of dielectric constant of Bi^3＋-doped BST thin films but also moves into the low-temperature region. Moreover, the average Curie tem- perature decreases gradually with the Bi^3＋ contents increasing.     

Study on the Microstructure and Dielectric Properties of Barium Strontium Titanate Thin Films Prepared by Sol-gel Method

Sr0.5Ba0.5–xBixTiO3 (BST) thin films were fabricated on a Pt/SiO2/Si substrate by the sol-gel method. Then follows an investigation of the influences of bismuth (Bi) on the microstructures and the dielectric properties of Sr0.5Ba0.5-xBixTiO3 (BST) thin films. The micro-structures of the BST thin films were examined by the XRD and the TEM techniques. Tetragonal perovskite crystal grains were observed in BST thin films. Increasing Bi3 doping ration in BST will lead to decrease of the grain size. It is found that Bi3 doping decreases the dielectric loss and improves the frequency dispersion of the BST thin films. Not only is compressed the peak of temperature-dependence of dielectric constant of Bi3 -doped BST thin films but also moves into the low-temperature region. Moreover, the average Curie tem-perature decreases gradually with the Bi3 contents increasing.     

TiO2基紫外探测器的制备及退火工艺对光电性能的影响

采用磁控溅射方法,通过不同工艺的退火处理,制备了光电性能优良的TiO2基紫外探测器.通过紫外光电性能测试、扫描电子显微镜( SEM)观察及X射线衍射(XRD)分析,研究了退火工艺对探测器光电性能的影响规律.结果表明:随着退火温度的增加,TiO2晶粒尺寸显著增大,晶界和缺陷数量的变化是导致TiO2基紫外探测器的光电性能随退火工艺变化的根本原因.经500℃/2h退火后,紫外探测器的光电流高出暗电流近2.5个数量级,紫外波段的光响应高出可见光波段近2个数量级,所制备紫外探测器达到了高辐射灵敏度和可见盲特性的要求.     

Effects of Atomic Oxygen Irradiation on Transparent Conductive Oxide Thin Films

作为一种功能薄膜,透明导电氧化物(TCO)薄膜在飞行器的抗原子氧(AO)涂层和太阳能电池领域有着巨大的应用价值。ZnO:Al(ZAO)和In2O3:Sn(ITO)薄膜是目前研究和应用最广泛的TCO。本文对ITO薄膜和ZAO薄膜进行了不同通量的AO辐照。通过对辐照前后样品的X射线衍射、扫描电镜及霍耳效应的表征及测试,研究了AO辐照对这两种TCO薄膜的结构、性能及电学特性的影响。研究表明AO辐照对ZAO薄膜表面有明显的侵蚀作用,但对其结构和导电性能没有明显影响。对于ITO薄膜,随着AO通量的增大,其载流子浓度逐渐下降从而导致了电阻率的提高,电阻率的最大变化达到了21.7%。     

沉积参数对磁控溅射镀金膜膜层残余应力与微观形貌的影响

残余应力直接影响镀膜膜层的稳定性与可靠性。为减小薄膜的残余应力,提高镀膜膜层的可靠性,在不同溅射气压、不同镀膜温度条件下,在熔融石英基底上进行了直流磁控溅射镀金膜试验。通过基片曲率法得到薄膜的残余应力,采用激光平面干涉仪对基片的形变进行测试,对不同工艺参数下膜层的残余应力进行分析,并采用扫描电镜对膜层的表面形貌进行测试。通过试验可知,磁控溅射镀膜膜层的残余应力随镀膜温度的升高而升高,在一定工作气压范围内（0.2Pa~0.6Pa)随溅射气压的增加而降低。电镜测试结果表明,常温镀膜晶粒的尺寸约为30nm,180℃镀膜晶粒的尺寸增长至近100nm。镀膜温度越高,薄膜的微观结构越致密。