梁-膜结构微压传感器研制

由四个弹性梁和一个刚性中心膜构成的梁-膜结构,具有平面应力集中效应,与一般的结构相比,这种膜片在受到微压时即产生较大的应力集中,使传感器在测量微压时有较高的灵敏度,它的特别的结构能解决一般结构膜片在很薄时由膜应力和弯曲应力产生的严重的非线性。介绍的这种双面腐蚀形成的梁-膜结构的硅压阻式微压传感器的设计就是采用这种应力集中原理,芯片结构的力学特性分析及样件测试结果表明,这种结构的微压传感器具有较高的灵敏度和较低的非线性,成功地实现了对微小压力的测量。利用有限元仿真计算对用于100Pa压力测量的梁-膜结构硅压力传感器的结构参数进行优化,并对芯片版图设计、制作工艺技术和传感器的特性等问题进行了讨论。     

微系统集成用倒装芯片工艺技术的发展及趋势

倒装芯片(Flip Chip,FC）技术是一种应用广泛的集成电路电子封装技术。随着电子产品不断向小型化和多功能化方向升级,尤其是在微系统集成领域飞速发展的驱动下,FC技术也在不断发展以满足细节距和极细节距芯片的封装要求。同时,FC技术也在工业化的过程中追求着性能、成本和封装效率的平衡。将FC封装体分为芯片凸点、基板以及底填充材料三个主要部分,深入讨论了FC封装的主流工艺和新兴工艺,介绍了各个工艺的流程及优缺点。此外,还分析了FC封装体在热、力以及电载荷作用下的可靠性问题。     

基于危险模式的无线传感器网络IDS模型

网络安全是无线传感器网络需要解决的重要问题之一,构建基于传感器网络的入侵检测系统是其中重要的技术.简要阐述了基于人工免疫模型及危险模式的入侵检测系统的机理,提出了一种基于危险模式理论的无线传感器网络的入侵检测系统体系结构,并对该模型的特点进行了分析,为进一步深入的研究提出了设想.     

Fault diagnostics and fault tolerant control

A novel simultaneous fault detection and diagnostics (FDD) and fault tolerant control (FTC) strategy for nonlinear stochastic systems in closed loops based on a continuous stirred tank reactor (CSTR) is presented. The purpose of control is to track the reactant concentration setpoint. Instead of output feedback we propose here to use proportional-integral-derivative (PID) state feedback, which is shown essential to achieve FTC against sensor faults. A new concept of “equivalent bias” is proposed to model the sensor faults. Both the states and the equivalent bias are on-line estimated by a pseudo separate-bias estimation algorithm. The estimated equivalent bias is then evaluated via a modified Bayes' classification based algorithm to detect and diagnose the sensor faults. Many kinds of sensor faults are tested by Monte Carlo simulations, which demonstrate that the proposed strategy has definite fault tolerant ability against sensor faults, moreover the sensor faults can be on-line detected, isolated, and estimated simultaneously     

微传感器最新发展

近年来，微传感器受到国际传感技术界的广泛关注，本文介绍十多个微传感器，包括三轴加速度计，单，双轴加速度计片，表面微机械陀螺（角速度传感器），微惯性导航系统，微磁通门传感器，磁阻传感器，纳米皮拉尼压力传感器，微科氏质量流量计，毫米波图像传感器，GPS手表（1cm^3)，二氧化碳传感器和微/超微角位移传感器，文事简要介绍它们的基本结构。敏感机理，特点等，从中可以看出微传感器已成为传感技术中有重要应用前景的组成部分。     

碰摩故障静电监测方法及模拟实验

针对航空发动机叶片碰摩故障难以实现在线监测的问题,展开基于静电感应原理的碰摩故障监测新方法研究。分析了碰摩颗粒产生与荷电机理,以静电传感器理论和点电荷感应信号特征为依据,建立了周期碰摩静电感应理论模型。研究结果表明:周期碰摩在静电传感器上的输出是一系列以碰摩频率为间隔的随频率增大幅值迅速衰减的周期离散谱线。为了验证模型的正确性,利用自行研制的静电传感器,采用模拟碰摩的方式进行了两组实验。第1组实验结果表明传感器可以监测到模拟碰摩故障产生的带电颗粒,碰摩阶段的信号活动率水平明显增大,但事件率没有出现明显的变化;第2组实验在信号频域出现了非常明显的特征频率及其二倍频,且二倍幅值频随频率增大迅速衰减,证明了模型的有效性。     

单片集成三轴微机电陀螺仪

为使陀螺仪进一步小型化、集成化,提出了一种新型单片集成三轴微机电陀螺仪,该陀螺仪采用单一MEMS结构芯片实现3个轴向角速度的测量.介绍了单片三轴陀螺仪工作方式、结构设计以及电路原理,完成了MEMS结构的流片加工,对陀螺仪表头和整机进行了测试,单片三轴微机电陀螺仪x轴、y轴和z轴零偏稳定性分别达到53.4(°)/h、70.8(°)/h和18.4(°)/h,非线性度分别为1.59×10-4、3.3×10-4和2.18×10-4.该陀螺仪具有三轴角速率检测效应,具有集成度高、体积小的优势,具有较强的应用潜力.     

Integrated microsystem for 3D magnetic field measurements

In this paper we present a portable battery-operated 3D magnetic microsystem (magnetodosimeter), intended for monitoring worker exposure to magnetic fields, in particular, working environments such as hospitals or physics laboratories. The proposed microsystem is based on a multichip module containing three equal channels for the three components of the magnetic field measurement, a microprocessor and a memory. Each single-chip channel detects the magnetic field, converts it into the digital domain and delivers the result to the microprocessor by means of an on-chip serial interface. The single-chip channel, fabricated in a 0.8 μm CMOS technology, is sensitive to magnetic fields ranging from -200 mT to +200 mT, achieving 12 bits of resolution and 11 bits of linearity     

基于人工免疫网络模型的航空发动机传感器故障诊断

提出了一种用于传感器故障诊断的免疫网络,对其结构和特点进行了分析,给出了相应的诊断算法。对传感器典型故障进行了故障诊断仿真,分析了免疫网络能检测出的最小故障偏差水平以及在不同噪声水平下的故障诊断效果。仿真结果表明,所研究的方法能有效检测到故障传感器,并具有良好的灵敏性及抗噪声干扰能力。     

一体化智能电磁流量计的研制

介绍了一种集传感器,转换器,积算仪器于一体的就地显示式智能电磁流量计,其研制中采用先进的单片微机芯片,实现在线多种信号采集和数据处理,并采用软件容错技术,大大提高了仪表的可靠性和测量准确度。     

SENSOR FAILURE DETECTION AND SIGNAL RECOVERY BASED ON BP NEURAL NETWORK

Manyhighpefformancecontrolsystemsmusthavefauhtolerantabilityagainstsensorfailures.Theapplicationofprevioussensorfailuredetectinnmethods,mostlybasedonanalyti-calredundancy['Jlislimitedbecausetheyrequireaprecise.mathematicalmedel.BPneuralnetwork(BPNN)isabletolearnanycomplicatedcontinuousnonlinearfunctions,therefore,itcanbeusedtodetectsensorfailuresandrecoverthesignalforthefailedsensor'Recentpubli-cationshavedemonstratedtheuseofBPNNfordetectingsomkindofsensorfailuresandre-coveringthefailedsen…     

检测传感器故障的鲁棒观测器

介绍一种在系统参数变化情况下进行故障检测的观测器。对观测器采用特征值、特征向量进行联合配置的算法 ,并对估计误差设计奇偶空间 ,使各传感器的故障在奇偶空间中被解耦分离 ,因而可用一个观测器检测与分离多路故障传感器 ,实现了故障检测的鲁棒性     

Sensor/actuator fault diagnosis based on statistical analysis of innovation sequence and Robust Kalman Filtering

In this paper, an approach to detect and isolate the aircraft sensor/actuator faults affecting the mean of the Kalman filter innovation sequence is presented. The effects of the sensor and actuator faults in the innovation process of the channels are investigated, and a decision approach to isolate the sensor and actuator faults is proposed. When a Kalman filter is used, the decision statistics change regardless of whether the fault is in the sensors or in the actuators, whilst when a Robust Kalman Filter (RKF) is used, it is easy to distinguish the sensor and actuator faults. A novel feature of this diagnostic method is that the innovation sequence based fault isolation algorithm has been presented and hence, the sensor/actuator fault detection and isolation problem has been solved. The categories (or classes) of the likely faults are not demanded. The statistical characteristics of the system are not required to be known after the fault has occurred. In the simulations, the longitudinal dynamics of an aircraft control system are considered, and the detection and isolation of pitch rate gyro faults and actuator faults affecting the mean of the innovation sequence are examined.     

由有限多个传感器测点诊断结构破损位置的试验研究

 提出了结构动态试验传感器测点位置的优化方法,发展了基于有限多个传感器测点信息的结构破损定位方法。该方法以结构各自由度的破损信息为条件,通过优化方法从结构的全部自由度中去掉那些所含结构破损信息很少的自由度,得到了有限个传感器测点的数目和位置,并且运用灵敏度分析和相关性分析方法,建立了直接利用不完整的实测模态振型诊断结构破损位置的破损定位方法,解决了测试振型不完整给结构破损诊断带来的困难。空间桁架结构破损诊断的实验研究表明,该方法能成功地诊断出结构单个或多个破损的位置。     

新型电子传感器在微裂纹检测中的应用

讨论了金属材料疲劳微裂纹与外逸电子发射的关系,提出了检测微裂纹的新型外逸电子传感器的设计方案,介绍了传感器电子控制电路与IBMPC/XT机的接口电路。实验结果表明,控制电路与接口电路设计合理,传感器测量精度较高、工作可靠。该传感器的研究和设计,可为金属材料微裂纹的无损检测开拓一条新的研究途径。     

ENGINE SENSOR FAULT DIAGNOSIS USING MAIN AND DECENTRALIZED NEURAL NET WORKS

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家用火灾自动报警装置的设计

城市家庭安装火灾自动报警装置非常必要。使用单片机,选用数字化温度传感器和烟雾检测器作为敏感元件,利用多传感器信息融合技术,设计适用于家庭的火灾报警装置,可使整个系统硬件电路设计合理,性能安全可靠。     

Sensor fusion for intelligent alarm analysis

The purpose of an intelligent alarm analysis system is to provide complete and manageable information to a central alarm station operator by applying alarm processing and fusion techniques to sensor information. This paper discusses the sensor fusion approach taken to perform intelligent alarm analysis for the Advanced Exterior Sensor (AES). The AES is an intrusion detection and assessment system designed for wide-area coverage, quick deployment, low false/nuisance alarm operation, and immediate visual assessment. It combines three sensor technologies (visible, infrared, and millimeter wave radar) collocated on a compact and portable remote sensor module. The remote sensor module rotates at a rate of 1 revolution per second to detect and track motion and provide assessment in a continuous 360° field-of-regard. Sensor fusion techniques are used to correlate and integrate the track data from these three sensors into a single track for operator observation. Additional inputs to the fusion process include environmental data, knowledge of sensor performance under certain weather conditions, sensor priority, and recent operator feedback. A confidence value is assigned to the track as a result of the fusion process. This helps to reduce nuisance alarms and to increase operator confidence in the system while reducing the workload of the operator     

Design of the TRIO system-on-chip for aerospace

Several design and testing aspects of the TRIO smart sensor data acquisition chip, developed by JHU/APL for NASA spacecraft applications are presented. TRIO includes a 10 bit self-corrected analog-to-digital converter (ADC), 16/32 analog inputs, a front end multiplexer with selectable aquisition time, a current source, memory, serial and parallel bus, and control logic. So far TRIO is used in many missions including Contour, Messenger, Stereo, Pluto, and the generic JPL X2000 spacecraft bus.     

航空发动机控制系统传感器FDIA系统仿真

基于卡尔曼滤波器组,建立了航空发动机控制系统传感器故障诊断系统,实现了对单个传感器故障的检测、隔离与重构(FDIA),确保了发动机控制系统即使在传感器故障发生的情况下,依然能安全可靠地工作.同时利用Simulink建立一个通用的发动机传感器故障诊断仿真平台,在此仿真平台上,对故障的诊断进行仿真验证,并分析了测量噪声对故障诊断系统性能的影响,为发动机在线传感器故障诊断系统的实现提供理论依据.