化学气相沉积法制备吸波型SiCN陶瓷的研究进展

化学气相沉积法(chemical vapor deposition,CVD)是近几十年发展起来的制备无机材料的新技术,具有制备温度低、所得材料均匀致密、可实现近尺寸成型等优点,是制备功能材料的常用方法之一。本文综述了几种常见的CVD 方法,如常压化学气相沉积(atmospheric pressure chemical vapor deposition,APCVD)、低压化学气相沉积(lowpressure chemical vapor deposition, LPCVD)、等离子体增强化学气相沉积( plasma enhanced chemical vapordeposition,PECVD)以及激光辅助化学气相沉积(laser assisted chemical vapor deposition,LACVD);重点阐述了采用LPCVD 在较低温度下制备SiCN 陶瓷吸波剂的工艺参数,提出了LPCVD 是制备新型吸波陶瓷的主要方法。     

直流电弧喷射等离子体炬阳极喷嘴积碳现象的研究

采用高功率直流电弧等离子体喷射化学气相沉积工艺,制备了不同厚度的自支称金刚石厚膜.实验发现,等离子体炬阳极喷嘴积碳是沉积过程中最突出的问题之一.从理论和实验两个方面研究了阳极积碳产生的原因,并通过激光拉曼光谱分析了碳球的结构和成分.结果表明,碳球由金刚石层、混合层和最外面的石墨层构成.详细分析了甲烷浓度、冷却水温度、放电电弧的局部高温、阳极喷嘴的表面质量对积碳形成的影响,并提出了改进措施.     

径向压力和温度分布对螺旋波等离子体波场和能量吸收影响研究

为了揭示螺旋波等离子体推力器中的等离子体源功率耦合机理,针对气体工质电离后被射频加热的稳态过程,考虑等离子体密度非均匀分布条件,采用三参数压力函数(fa,sp,tp)和温度函数(f_a,s_t,t_t)表示柱状等离子体内压力和温度的径向分布,分析了径向压力梯度、温度梯度对螺旋波等离子体内功率沉积、波电场、波磁场和电流密度的影响。考虑梯度为正,梯度为负和梯度为零三种梯度类型。结果发现:压力梯度为正时,螺旋波在等离子体临近壁面处的功率沉积减弱,但射频波透入深度增加,原因是靠近管壁处等离子体密度较低,RF波径向单位长度衰减较少,透入深度增加。温度梯度为负时,柱状等离子体中心处能量沉积变强,原因是管中心位置等离子体密度较大,电子温度较高,与RF波能量耦合增强;横向截面的电磁场、电流密度分布在不同压力和温度梯度下基本不变,证明了m=1模式的稳定性。     

激光推进辐射击穿温度特性的数值研究

在9种等离子体击穿温度下,数值模拟了二次反射式聚焦系统聚焦情况下激光推力器内流场的演化过程,得到了不同击穿温度对应的能量沉积率、推力峰值、冲量和冲量耦合系数,能量沉积率和推进性能参数在某个等离子体击穿温度值处发生突变。根据空气对激光的逆韧致吸收系数公式,计算了CO2激光辐照下不同等离子体击穿温度对应的空气辐射自由程,发现当等离子体击穿温度为14000K时,辐射自由程为1.4mm,与计算网格的典型尺寸相当,此时入射激光能量在一个网格内以一定效率被吸收,由此确定了基于逆韧致吸收的激光等离子体的击穿温度。     

静止空气中单脉冲激光能量非对称沉积实验与数值模拟

为了研究纳秒脉冲激光能量沉积减小高超声速飞行器波阻的机理和规律,首先要研究纳秒脉冲激光能量在静止空气中的沉积现象。提出一种新方法测量了激光能量吸收率。并采用高分辨率纹影系统,对纳秒脉冲Nd:YAG固体激光器(波长532nm,最大激光能量368m J/pulse)击穿静止空气后所形成的等离子体热核进行观测。基于FLUENT软件并编写UDF,结合非对称能量沉积模型和空气等离子体参数,采用层流模型、Roe-FDS通量格式对激光能量沉积后的流动现象进行了数值模拟。结果表明,激光能量吸收率随着入射激光能量的增大而不断增大,并最终稳定在0.45左右。纳秒脉冲激光能量沉积后的流场纹影序列图像很好地呈现了爆炸波的传播、等离子体热核的演变和涡环的形成。激光能量沉积后60~120μs,涡环的涡核平均直径基本不变,且与入射激光能量大小呈二次函数关系。爆炸波约在t=60μs之后衰减至近似声波,此后其波速受入射激光能量大小的影响较小。数值模拟结果表明,Richtmyer-Meshkov不稳定性和激光能量的非对称沉积,是等离子体演化出尖刺的原因。     

等离子体辅助电子束物理气相沉积制备热防护涂层

电子束物理气相沉积(Electrom Beam-Physical Vapor Deposition,EB-PVD)是制备航空发动机热防护涂层的一种重要技术手段。采用等离子体辅助技术可进一步实现EB-PVD涂层的结构改性和性能提升。对等离子体辅助EB-PVD技术的研究现状进行了简要综述,并对等离子体辅助EB-PVD制备航空发动机MCr Al Y抗氧化涂层、氮化物抗冲蚀涂层及YSZ热障涂层研究进行了介绍。     

等离子体化学动力学效应对超燃燃烧室中氢氧燃烧的影响研究

为探究等离子体化学动力学对超燃燃烧室中氢氧燃烧流场的影响及其相关机理,在氢气燃料喷流中添加不同浓度的活性粒子以模拟等离子体化学动力学效应。利用数值模拟手段,分析了不同活性粒子浓度下,超燃燃烧室中产物水的生成、凹腔后缘近壁面处压力分布以及等离子体化学动力学相关作用机理。研究结果表明:在燃烧反应建立初期,活性粒子浓度越高,燃烧产物形成越快、分布范围越广。等离子体的作用使得凹腔后缘近壁面中心区终点处压力峰值增大,峰值最大增幅9.4%,同时也削弱了侧壁面区域压力峰值,峰值最大减幅7.7%。等离子体化学动力学通过加快氢氧原有核心反应的正向进行,使得后续燃烧所需要的O,OH等粒子被快速积累,从而加快了反应的总体进行,缩短了产物生成时间。     

沉积波纹管发展现状

本文概述了目前国内外沉积波纹量的现状,重点介绍了电沉积镍、黄铜和化学沉积镍磷合金波纹管的工艺方法、材料和波纹管的特性,最后介绍了沉积波纹管的应用情况。     

磁场作用下螺旋波与TG波耦合模式数值模拟研究

为了研究螺旋波放电的高电离效率,揭示螺旋波等离子体推力器射频功率向等离子体的沉积机制,对m=+1型螺旋波与TG波耦合模式随磁场的变化特征,以及对波磁场、电场、电流密度的影响规律进行了数值模拟研究。计算结果显示:B0≤500G的低磁场条件下,螺旋波与TG波构型相似,耦合较强,大部分射频功率由螺旋波耦合到TG波内,并经TG波的强阻尼作用,在天线下游0.2~0.4m距离内沉积到等离子体中;高磁场下,螺旋波向TG波的耦合效率降低,螺旋波将一部分射频能量输运到下游并持续向TG波耦合,由TG波的阻尼作用沉积到等离子体中,轴向的功率分布特征就表现为螺旋波的本征模式;随着外加磁场强度的增大,波磁场、电场的部分分量沿z轴的分布由幅值衰减状态变为准周期性波动状态,电流密度的变化特征与功率沉积密度较为相似。     

冷态输送ZrCl4低压化学气相沉积ZrC涂层的制备

采用zrCl4-CH4-H2-Ar反应体系,冷态输送ZrCl4粉末化学气相沉积(CVD)制备ZrC涂层.采用热力学计算并结合实验结果分析了冷态输送ZrCl4化学气相沉积ZrC涂层的特点,采用X射线衍射仪和扫描电镜分析了涂层的物相组成、表面形貌和组织结构.结果表明:冷态输送ZrCl4粉末大幅度降低了ZrC的化学气相沉积温...     

2Cr13钢的全方位离子注入与离子束增强沉积复合表面强化处理

对 2Cr13不锈钢表面进行了等离子体浸没离子注入(PIII)与离子束增强沉积(IBED)复合强化处理。对强化后的试样进行了俄歇电子能谱(AES)、X光电子能谱(XPS)分析及显微硬度、摩擦磨损和耐腐蚀性能测试。结果表明,处理后的试样表面层中含有强化相TiN和CrN;与基体相比,被处理试样的显微硬度显著增大,最大增幅达80 4%;摩擦系数降至 0 2~0 3,磨痕宽度最大减少了近 4倍;腐蚀电位最大提高了 5倍,腐蚀电流密度减少了 26倍。磨损中粘着现象大大减轻,耐磨耐蚀性能得到了显著改善。     

航空等离子体动力学与技术的发展

自20世纪60年代以来,美国、俄罗斯等发达国家开始研究等离子体的性能.近年来,以美国为首的西方国家在航空等离子体动力学与技术的研究取得了突破性的进展,国内相关研究也取得了一些进展和自主创新.本文主要介绍了空军工程大学等离子体动力学重点实验室的等离子体流动控制技术研究成果,主要包括改善飞行器气动性能和推进效能、等离子体冲...     

射频离子推力器热特性仿真分析

为了分析射频离子推力器热特性，建立了射频离子推力器整体热模型，基于二维流体模型，对11cm射频离子推力器开展了放电室等离子体仿真，获得了电子温度、电势分布等关键参数；以等离子体仿真结果和实测束电流为输入，获得了各热源的热通量；通过有限元计算获得了关键部组件的温度分布，与实验结果进行了对比分析。研究结果显示：放电室内电子温度约为3.6eV~3.9eV，等离子体电势最高20V，发热损耗主要来自带电粒子轰击放电室壁面和栅极造成的能量沉积、激发原子的热辐射以及射频线圈自身的发热损耗，温度仿真与实测结果一致性良好，最大误差7%，仿真得到的温度分布可以作为输入参数进一步研究栅极受热形变及对束流的影响。     

Numerical investigation of aerodynamic flow actuation produced by surface plasma actuator on 2D oscillating airfoil

Numerical simulation of unsteady flow control over an oscillating NACA0012 airfoil is investigated. Flow actuation of a turbulent flow over the airfoil is provided by low current DC surface glow discharge plasma actuator which is analytically modeled as an ion pressure force produced in the cathode sheath region. The modeled plasma actuator has an induced pressure force of about 2 k Pa under a typical experiment condition and is placed on the airfoil surface at 0% chord length and/or at 10% chord length. The plasma actuator at deep-stall angles(from 5° to 25°) is able to slightly delay a dynamic stall and to weaken a pressure fluctuation in down-stroke motion. As a result, the wake region is reduced. The actuation effect varies with different plasma pulse frequencies, actuator locations and reduced frequencies. A lift coefficient can increase up to 70% by a selective operation of the plasma actuator with various plasma frequencies and locations as the angle of attack changes. Active flow control which is a key advantageous feature of the plasma actuator reveals that a dynamic stall phenomenon can be controlled by the surface plasma actuator with less power consumption if a careful control scheme of the plasma actuator is employed with the optimized plasma pulse frequency and actuator location corresponding to a dynamic change in reduced frequency.     

Auroral Plasma Acceleration Above Martian Magnetic Anomalies

Aurora is caused by the precipitation of energetic particles into a planetary atmosphere, the light intensity being roughly proportional to the precipitating particle energy flux. From auroral research in the terrestrial magnetosphere it is known that bright auroral displays, discrete aurora, result from an enhanced energy deposition caused by downward accelerated electrons. The process is commonly referred to as the auroral acceleration process. Discrete aurora is the visual manifestation of the structuring inherent in a highly magnetized plasma. A strong magnetic field limits the transverse (to the magnetic field) mobility of charged particles, effectively guiding the particle energy flux along magnetic field lines. The typical, slanted arc structure of the Earth’s discrete aurora not only visualizes the inclination of the Earth’s magnetic field, but also illustrates the confinement of the auroral acceleration process. The terrestrial magnetic field guides and confines the acceleration processes such that the preferred acceleration of particles is frequently along the magnetic field lines. Field-aligned plasma acceleration is therefore also the signature of strongly magnetized plasma. This paper discusses plasma acceleration characteristics in the night-side cavity of Mars. The acceleration is typical for strongly magnetized plasmas – field-aligned acceleration of ions and electrons. The observations map to regions at Mars of what appears to be sufficient magnetization to support magnetic field-aligned plasma acceleration – the localized crustal magnetizations at Mars (Acuña et al., 1999). Our findings are based on data from the ASPERA-3 experiment on ESA’s Mars Express, covering 57 orbits traversing the night-side/eclipse of Mars. There are indeed strong similarities between Mars and the Earth regarding the accelerated electron and ion distributions. Specifically acceleration above Mars near local midnight and acceleration above discrete aurora at the Earth – characterized by nearly monoenergetic downgoing electrons in conjunction with nearly monoenergetic upgoing ions. We describe a number of characteristic features in the accelerated plasma: The “inverted V” energy-time distribution, beam vs temperature distribution, altitude distribution, local time distribution and connection with magnetic anomalies. We also compute the electron energy flux and find that the energy flux is sufficient to cause weak to medium strong (up to several tens of kR 557.7 nm emissions) aurora at Mars. Monoenergetic counterstreaming accelerated ions and electrons is the signature of field-aligned electric currents and electric field acceleration. The topic is reasonably well understood in terrestrial magnetospheric physics, although some controversy still remains on details and the cause-effect relationships. We present a potential cause-effect relationship leading to auroral plasma acceleration in the nightside cavity of Mars – the downward acceleration of electrons supposedly manifesting itself as discrete aurora above Mars.     

IBAD法沉积TiN薄膜的机械和耐腐性

用离子束辅助沉积(IBAD)方法在医用不锈钢317L基底上沉积TiN陶瓷薄膜。通过X射线衍射(XRD)和俄歇电子能谱(AES)分析研究了薄膜的微结构；测试了薄膜的耐磨性及薄膜与基底的附着力：运用电化学腐蚀的方法检测了薄膜在Hank’s模拟体液中的耐腐蚀性能。研究结果表明：用高、低能氮离子束兼用的IBAD方法沉积TiN多晶薄膜后，材料表面结构和性能发生明显改变。表面硬度和耐磨性有明显提高，在Hank’s模拟体液中显示出更强的抗腐蚀能力。     

不同制备工艺对MoSi2涂层抗氧化性能的影响

为解决MoSi2和SiC线膨胀系数差异,在带有SiC外涂层的C/C复合材料表面采用等离子喷涂、电弧沉积和固渗等工艺制备MoSi2涂层。涂层表面形貌分析发现,等离子喷涂MoSi2涂层多孔不致密,电弧沉积MoSi2涂层易开裂剥落;而固渗MoSi2涂层致密均匀,且界面结合力好。氧化试验也表明,固渗MoSi2涂层性能较好。     

Coating deposition regularity depended on orientation difference in PS-PVD plasma jet

The YSZ coatings are prepared by the plasma spray-physical vapor deposition (PS-PVD) technology based on a specific experimental design. The structure, thickness and growth angle of YSZ coatings on the entire circumferential surface of the cylindrical sample are studied. The results indicated that the structure, thickness and deflection growth angle of YSZ coatings are related to the orientation of deposition location. The numerical simulation of the multiphase mixed fluid near the substrate is carried out and the deposition regularity and mechanism of YSZ coatings prepared by PS-PVD is deduced. The growth rate is related to the local characteristics of the plasma flow field, and is directly proportional to the field pressure and inversely proportional to the field velocity. The growth angle of the coating is generally affected by the flow direction of the plasma jet. Especially, the normal component of velocity vector, V_norm, mainly affects the speed at which the coating grows vertically upwards. The tangential component of velocity vector, V_tan, determines the degree that the coating growth direction deviates from the vertical direction. When V_tan ≠ 0, the coating forms a fine column with a certain deflection angle and finally develops into an oblique columnar structure.     

TiN膜离子注入与沉积工艺研究

采用离子注入、沉积、动态混合注入沉积工艺,在硅基体上制备TiN膜层.用纳米划痕法检测成膜质量,用扫描电镜观察划痕形貌.对比分析结果表明,动态混合离子注入沉积工艺对提高膜层与基体的结合性能效果显著.