| 隔热背腔式柔性热膜探头的设计及其微加工 |
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| 引用本文： | 马炳和,郝日鹏,邓进军,朱鹏飞. 隔热背腔式柔性热膜探头的设计及其微加工[J]. 航空工程进展, 2013, 4(3): 327-332 |
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| 作者姓名： | 马炳和 郝日鹏 邓进军 朱鹏飞 |
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| 作者单位： | 西北工业大学空天微纳系统教育部重点实验室,西安,710072 |
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| 摘 要： | 为了进一步提高器件性能，设计一种新型隔热背腔式柔性热膜传感器探头结构。借助流体传热耦合仿真和动态响应分析等，确定背腔结构参数；研发针对隔热背腔式柔性热膜探头的双面图形化微加工工艺，获得新型传感器件。对静／动态特性进行对比测试，结果表明：在相同的输入被测量情况下，新结构器件的输出信号量值提高了20％，时间常数由400μs减小到220μs，器件的灵敏度和动态响应性能都获得了有效提升。
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| 关 键 词： | 柔性热膜 隔热背腔 仿真 微加工 |
Design and Micromachining of Flexible Hot Film Sensor with Insulating Cavity Underneath |
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| Ma Binghe , Hao Ripeng , Deng Jinjun , Zhu Pengfei. Design and Micromachining of Flexible Hot Film Sensor with Insulating Cavity Underneath[J]. Advances in Aeronautical Science and Engineering, 2013, 4(3): 327-332 |
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| Authors: | Ma Binghe Hao Ripeng Deng Jinjun Zhu Pengfei |
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| Affiliation: | of Micro/Nano Systems for Aerospace of Northwestern Polytechnical University, Xian the Ministry of Education, 710072, China) |
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| Abstract: | To improve the sensitivity and dynamic performance, presented a new type of flexible hot film sensor with a cavity underneath for thermal insulation. With FVM simulation and dynamic performance analysis, the structural parameters of the cavity were determined. The double side micromachining processes of flexible hot film sensor with the cavity underneath were proposed. The static and dynamic performance of two kinds of sen- sor were studied in wind tunnel. Compared with the sensor without cavity, the new sensor shows 20% output increase with the same input and time constant drop from 400 μs to 220 μs. This means higher sensitivity and dynamic response speed were obtained. |
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| Keywords: | flexible hot film insulating cavity simulation micromachining |
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